Silicon-based microsensors for industry, medical and environmental technology


CiS Forschungsinstitut für Mikrosensorik GmbH was founded in 1993 as a non-profit, industry-oriented research institute focusing on the development of silicon technologies for high-quality microsensors and microsensor systems as well as extremely radiation-hard silicon detectors. At Sensor+Test 2019, the CiS Forschungsinstitut will present current developments and research results from the business units MEMS, MOEMS and silicon detectors for applications in industry, medical and environmental technology.

Sensors for customer-specific applications in the fields of industry 4.0, energy and mobility are the focus of the MEMS business unit. Based on piezoresistive MEMS sensors, 3D force sensors can be miniaturized. Furthermore Si-DMS and temperature diodes will be presented, which can be used for temperatures up to 300 °C. Through the application of innovative concepts of assembly and connection technology, differential pressure sensors are qualified for use in harsh environmental conditions.
In the MOEMS area, innovative solutions for the assembly and system design of UV LEDs could be developed. Silicon packages simultaneously increase the yield of the usable light by up to a factor of 3 and ensure optimum heat dissipation of the sensitive light-emitting diodes. New solutions for hybrid and wafer-based assembly, which can also be transferred to IR components, have been developed. The CiS Forschungsinstitut is thus in a position to provide the MEMS IR emitters, optics and detectors developed in-house in an extremely compact and hermetically sealed design, e.g. for use in gas sensors. On this basis, the focus is currently on the development of miniature spectrometers for the IR range.
The SiDE business unit develops silicon detectors that meet very high requirements for applications in high-energy and heavy ion physics. For the detection of cosmic radiation, extremely beam-hard, large-area and thin pixel and double-sided microstrip detectors are required. The complete in-house value chain from design to test and analysis offers highest performance. New challenges arise in the development of single photon detectors and modules for applications in quantum-based measurement and analysis systems.

Visit us in hall 1, booth 1-150.

CiS Forschungsinstitut für Mikrosensorik GmbH
Konrad-Zuse-Str. 14 • 99099 Erfurt • Germany