8th GMM Workshop Micro-Nano-Integration 2020


At the 8th GMM Workshop Micro-Nano-Integration 2020 the CiS Forschungsinstitut will be represented with two exciting short lectures. On Thursday, September 17th, Dr. Thomas Frank will give a lecture on "Force and displacement sensor for nanoindentation". Different methods are available for the determination of hardness. A new sensor arrangement will be presented, which corresponds to Abbe's "comparator principle". A silicon-based strain gauge with 4 measuring bridges is used as sensor.

Afterwards Julia Baldauf presents current research results on "Laser induced periodic surface structures based on molybdenum silicide thin films". One-dimensional molybdenum and molybdenum silicide nanostructures are interesting for heater structures due to the CMOS compatibility of the materials. One-dimensional nanostructures based on these materials are shown, which were generated by irradiation with a fs-laser. Furthermore, the necessary fluence for the formation of these structures on amorphous molybdenum silicide layers was determined.

The online symposium is organized by the VDE/VDI Society for Microelectronics, Microsystems and Precision Engineering in cooperation with Ruhr-University Bochum.

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