Trade Fair Sensor+Test and Congress SMSI


SENSOR+TEST 2021, the leading forum in the fields of sensor, measurement and testing technology, will start next week. Due to Corona, the trade fair will take place as an online-only event - and the CiS Research Institute will also be represented with a digital presence. Get your free online ticket at this link:

and in English:

In parallel, the new international congress SMSI 2021 - Sensor and Measurement Science International will also take place as a digital event for the first time. On Wednesday, our business manager MOEMS will give a presentation on "Influence of microstructure on drift velocity in electromigration of aluminum through molybdenum disilicide thin films". A difference in the drift velocity of aluminum could be observed in the scanning electron microscope for polycrystalline thin-film molybdenum disilicide conductors with different grain sizes, explains Dr. Martin Schädel.

Session: B7 Sensor Materials II
Wednesday, May 5, 2021, 5:20 - 5:40 p.m.
B7.3 - Influence of the Microstructure on the Drift Velocity of Electromigrating Aluminum through Molybdenum Disilicide Thin Films.
Speaker: Dr. Martin Schädel, Business Unit Manager MOEMS

Dr. Thomas Frank. Manager Business unit MEMS, will give two more presentations at SMSI 2021. In Session A on force, pressure and torque measurement, he will report on current investigations into determining the preload force of bolted joints and describe here two methods for determining the preload force using silicon strain gauges (SGs). In the second presentation, Dr. Thomas Frank reports on a pressure sensor chip made of <110> p-silicon that achieves an ideal symmetrical change in resistance due to the compressive load.

Sessions: A4 Force, Pressure and Torque Measurement / A4.3 Investigations to Determine the Clamping Force of Screw Connections ⁠
Wednesday, May 5, 2021, 11:40-12:00 a.m.
Speaker: Dr. Thomas Frank, Head of Department MEMS

A screw is a machine element for frictional connection of two or more components. Particularly security-relevant connections require regular checks. Subsequent checking of the assembly preload is not possible without various additional measures. It is advantageous to monitor the assembly preload. The article describes two methods for determining the clamping force using silicon strain gauges. The clamping force stretches the screw shaft, compresses the elements to be joined and deforms both the screw head and the nut or washer. The deformation of the screw head or the washer contains all in-formation about the clamping force. The described use of the silicon strain gauges enables the deformation to be precisely recorded. The clamping force can be determined via the deformation.

Session: B7 Sensor Materials II / B7.1 Highly Stable Pressure Sensors made of <110> Silicon
Wednesday, May 5, 2021, 4:40-5:00 p.m.
Speaker: Dr. Thomas Frank, Head of Department MEMS

A pressure sensor chip of <110> p-silicon is described. The piezoresistive measuring resistors run, in <110> direction. They have only a noticeable longitudinal effect. This is the first prerequisite for an ideal mirror-image arrangement of a measuring bridge. Thus it is possible to achieve an ideal symmetrical change in resistance due to the compressive load. These sensors were manufactured, the effectiveness is presented.