MEMS design for highly stable and high-precision pressure sensors - CiS Forschungsinstitut für Mikrosensorik cooperates with TU Hamburg-Harburg

17.06.2016

Researchers and developers of both facilities are working together on a project to achieve greater safety in the development and production of application-specific piezoresistive pressure sensors with a multiphysical simulation.

Again and again there are deviations between simulated and actually measured characteristic curves. These may be caused by various physical influencing factors that have not been sufficiently represented in previous simulation programs.

A highly stable adaptive FEM solver developed at TU Hamburg-Harburg allows new simulations coupled with reasonable effort between mechanics, temperature and semiconductor electronics and leads to an improved correspondence of simulation and actual measurement results.