| Project Title |
Acronym |
End |
| New solderable metallization processes in the submicrometer range for pixel detectors |
µPixSol |
31.12.2016 |
| Capillary for continuous glucose monitoring |
µKAP |
30.09.2016 |
| Micro high power lighting system for mass applications |
µHBS |
30.06.2015 |
| Sensors for belt tension monitoring |
ZugKraftSensor |
31.07.2024 |
| Differential pressure sensors resistant to overload |
ÜLaDru |
31.12.2016 |
| High-efficiency solar cells on ultra-thin silicon wafers |
xµ-Zellen II |
31.12.2013 |
| Modules with ultra-thin silicon solar cells |
xµ-Module II |
31.12.2013 |
| Materials for ultra-thin silicon solar cells |
xµ-Material II |
31.12.2013 |
| Wafer Level Packaged Pressure Sensor With Through Silicon Vias |
WPT |
30.09.2014 |
| Development of a wafer-level package for UV LEDs based on multifunctional silicon and ceramic submounts |
WLP-Mount |
31.07.2019 |
| Shade-free UV illumination with UVLEDs |
VUVB (ValEndUV) |
31.12.2021 |
| Diamond and Silicon UV-Vis Hybrid Sensor |
UVPD |
31.05.2017 |
| Expansion of the microassembly center for the development of application-specific UV LED modules |
UV-MMC |
31.12.2019 |
| Low Gain Avalanche Detectors for Steeling with Low Penetration Depth in Silicon |
UV-LGAD |
28.02.2022 |
| 3D detector development |
TRIDENT |
31.03.2020 |
| Time-resolved luminescence analysis of semiconductors |
TreLAS |
30.06.2015 |
| Development of a CMOS-compatible thermopile infrared sensor for gas detection |
TPS |
31.10.2017 |
| CMOS-compatible thermopile infrared sensor arrays |
TPA |
28.02.2022 |
| Development of Temperature Compensated Silicon Strain Gauge Sensors |
TKompDMS |
31.03.2022 |
| High-precision temperature diodes for better compensation of temperature cross-sensitivity |
Tkomp |
30.06.2015 |
| Mechanical and optical characterization of wafers and saw materials |
ThinWafer |
31.12.2013 |
| Thermal decoupling for high temperature sensor technology |
ThEK |
30.04.2022 |
| Textured Blackbody MEMS IR Illuminator |
TeSIS |
31.01.2022 |
| Technological Sensor Optimisation of Radiation Detectors |
TENSOR |
30.06.2018 |
| Temperature-dependent charge carrier properties |
TeLa |
31.03.2020 |
| Touch probe with greatly reduced probing force for determining the instrumented indentation hardness |
TARZAN |
31.10.2019 |
| Development of semitransparent optical sensors as components of micro- and optoelectronic systems |
Tandemdiode |
31.12.2022 |
| Careers in high-radiation Environment Technologies: Planar pixel sensor development for high-resolution imaging and particle physics |
Talent |
31.12.2016 |
| Development of very flat 3D force sensors incl. evaluation electronics and suitable software solutions for a new tactile gripping system with innovative force feedback control for use in disarming robots |
Tactile Gripper |
30.06.2023 |
| Smart Sensor Technologies and Training for Radiation Enhanced Applications and Measurements |
STREAM |
31.12.2019 |
| Radiation resistant relative humidity sensor |
SRF |
31.12.2016 |
| High-resolution modular spectro-polarimeter using advanced semiconductor processes |
SpektroPol |
28.02.2018 |
| Smart, highly miniaturized fluorimeter |
SmartFLU |
31.12.2019 |
| Intelligente Systemintegration/Smart Access to Manufacturing für die Systemintegration |
Smarter-SI |
31.01.2018 |
| Development of a high-accuracy, form-fit-assisted flip-chip thermocompression process |
smartbond |
31.03.2022 |
| Innovation Forum SmartDiamonds - A regional network for the promotion of innovative functional diamond coatings in microsensor technology |
Smart Diamonds |
28.02.2017 |
| Scaling of microsensors in nanometer range |
SkaMiNa |
31.10.2022 |
| Green Energy with silicon thermogenerators |
SiTEG |
30.04.2014 |
| Assembly and packaging technology of miniaturized, silicon-based strain measurement sensors |
SiStGAP |
31.12.2017 |
| Development of low-cost silicon substrates based on screen printing technology for local doping and metallization |
SiSi |
30.11.2017 |
| Fast infrared sensor with integrated optics |
Sirio |
31.08.2021 |
| Defect engineering in silicon for the optimization of sensor properties |
SiPlus |
31.12.2016 |
| System-in-Package for a miniaturized gas sensor up to 200 °C / Hermetic package of IR modules |
SiPamiG-200 |
31.07.2017 |
| Single Photon Detector |
Single Photon Detector |
31.05.2017 |
| Silicon detector for electrons with energy 1keV |
SiekeV |
30.04.2021 |
| Simulation and design of quantum electronics and quantum processors |
SiDQuP |
31.08.2024 |
| Implantable silicon dosimeter |
SiDo |
30.06.2022 |
| Improving the stability of hybrid silicon strain sensors |
SiDMESES |
28.02.2023 |
| Platform for SiCer compatible Si sensor technology |
SiCer-SST |
31.08.2022 |
| Miniaturized silicon strain elements for precision force measurement |
Si-DMS |
30.04.2015 |
| Sensor for Heat Radiation |
SHeRa |
31.08.2019 |
| Development of a sensor system for controlling and increasing the moisture protection of internally insulated exterior wall constructions with a thermovariable inner layer |
SensorTex |
28.02.2017 |
| Sensitive microswitch |
SEMIS |
31.01.2014 |
| Development of next generation solar cells by realizing the selective emitter using novel screen printing technologies Subproject: Novel screen printing technologies for manufacturing selective emitter solar cells |
SelemSi |
31.08.2014 |
| Screw Fixing Monitoring |
Screw Fixing Monitoring |
31.12.2020 |
| Development of a miniaturized optical roughness sensor for the classification of machined surfaces |
Rz-Sens |
31.05.2014 |
| Feedback-free direct assembly of MEMS sensors |
RUDIS |
31.08.2018 |
| Development of a bonding process for innovative reactive systems with a focus on a laser-based ignition technology, industrial reliability and process safety. |
RNFSys |
31.05.2019 |
| Direction sensitive quadrant detector |
RiSeQ |
31.12.2016 |
| Resonant pressure sensor: Sensor that has a structure that measurably changes its resonant frequency when the external pressure is varied |
Resonanter Drucksensor |
30.04.2019 |
| Resonant silicon differential pressure sensors |
ReSi-DDS |
30.04.2024 |
| Redundant temperature measurement up to 300°C |
Redundanz |
31.03.2023 |
| Development of fine-granular, imaging-artefact-poor pixel radiation detectors for medical applications based on a micro-nano-structuring module for lithographic processes |
RadioMed |
30.04.2014 |
| Quantum HUB Thuringia |
Quantum HUB Thüringen |
31.12.2023 |
| Quantum computing in solid state technology |
QSolid |
31.12.2026 |
| Quantum mechanical calculation of electronic parameters |
QMEMS |
30.09.2021 |
| Spitzencluster Solarvalley: Verbundvorhaben PV-Laser - Neue Laserprozesse für die Wafer- und Zellbearbeitung (PV-Laser) - Teilvorhaben "Optimierung und Untersuchung laserbasierter Strukturierungsprozesse für Maskenschichten in der Siliziumphotovoltaik der |
PV-Laser |
31.12.2012 |
| Development of a micro-optical sensor for pulse shape analysis as the basis of a photoplethysmographic pulse wave measurement |
PuWeS |
31.12.2014 |
| Power Sensor Line |
PSL |
31.12.2012 |
| Precise resistors in silicon for microsystem technology |
PReSi |
31.03.2014 |
| Polycrystalline silicon as a functional layer in microsystems technology |
PoSiMi |
31.10.2022 |
| Photodiodes without back reflection |
PoRr |
30.06.2022 |
| Temperature-dependent investigation of IU characteristics on SOI diodes |
Polytemp |
28.02.2021 |
| Temperature-dependent investigation of IU characteristics on SOI diodes |
Platina |
31.10.2020 |
| Planarized wafer level packaging for hermetically sealed microsensors |
PlanWLP |
30.09.2018 |
| PIEZO - Calculation and Verification of Piezo Coefficients in Pressure Sensor Design Flow |
PIEZO |
31.12.2016 |
| Gas detection based on absorbers integrated in thermopiles |
PhIR-10 |
31.01.2024 |
| Photonic crystals for IR gas analysis |
PhiR |
30.04.2021 |
| Sensor development for negative pressure, elevated temperatures and media contact |
Pedro |
30.11.2021 |
| Long-term stable passivation of piezoresistive sensors for demanding sensor environments |
PassDru |
30.06.2020 |
| Photoacoustic gas sensor with reference gas sensor |
PAS |
31.07.2023 |
| Demand-responsive oxygen delivery in clinical ventilation (OXYgen on demand during clinical VENtilation) |
OxiVent |
31.08.2014 |
| UV LEDs with optimized light extraction due to adapted encapsulation technology |
Olavv |
31.05.2021 |
| Optically readable pressure and temperature sensor |
ODTS |
31.07.2017 |
| Novel isothermal sensor through front cavities |
NIVo |
31.07.2023 |
| NDUV Ammonia gas sensor |
NH3SENS |
30.06.2022 |
| New optical particle counter for large volumes |
NewPARZ |
29.02.2024 |
| Development of a hardness measuring head based on a novel combined force-displacement sensor with a resolution of 100pm to determine the hardness of surfaces in the nanometer range |
NanoSense |
31.07.2023 |
| Separating diaphragm |
NanoKAP |
31.12.2016 |
| Nanoscale III-V/silicon heterostructures for high-efficiency solar cells. |
Nano-III-V-pins |
31.09.2014 |
| Micro thermopile line |
MyTZe |
31.03.2024 |
| Measurement routines and optical tests for radiation sensors |
MuT |
30.04.2021 |
| Multivalent sensor array with implanted interdigital electrodes |
MUSIGA |
30.06.2014 |
| Development of multi-lambda UV emitters with adapted optical elements and optimized assembly and connection technology |
Multi-Lambda-UV |
31.07.2018 |
| Multifotodiode with multiple three-dimensionally delimited active areas for high resolutions and temperatures |
MuFoDi |
31.05.2017 |
| Micro-Structure Transformation of Silicon |
MSTS |
30.04.2019 |
| Development of a multispectral sensory microsystem to determine wavelength-dependent lateral intensity distributions for reflective pulse oximetry |
MS-LateIn |
28.02.2014 |
| Development of a micropixel silicon photomultiplier |
MPSPM |
31.12.2014 |
| Model-based process control of biogas plants Subproject 2: Sensor technology |
MOST |
30.06.2017 |
| Development of a production-optimized integrated high-power UV emitter |
Monta-PHOS |
30.04.2019 |
| Micro optical leveling sensor |
Moni |
31.10.2022 |
| Mounting stress-resistant pressure sensor chips |
MoDru |
30.09.2022 |
| Modular microprobe systems |
MMS |
31.05.2017 |
| Miniaturized InfraRed Emitter Chip |
MIREC |
30.09.2019 |
| Miniaturized fluorimeter |
MiniFLU |
30.04.2017 |
| Miniaturized pressure sensor for a pressure range smaller than 10 mbar |
mini10 |
30.06.2019 |
| Microsensor technology based on nano- and microcondensation |
MiNaKo |
31.10.2014 |
| Micro Laser Doppler Sensor |
MiLD |
31.12.2016 |
| Force and displacement standard for the nanoscale - micro force sensor |
Mikrokraftsensor |
31.07.2014 |
| Microchannel cooling |
Mikrokanalkühlung |
31.12.2016 |
| Long-term stable micro-macro coupling to build ultra-flat silicon strain sensors for macroscopic test specimens |
Mikado |
30.09.2021 |
| Methods for optimal design of sensor networks and integration in context models |
MESNW |
28.02.2022 |
| Media-resistant differential pressure sensor |
MeReDiD |
31.05.2017 |
| Multilayer structures for chemically resistant, long-term stable sensor technology |
MARLen |
31.01.2020 |
| MEMS Gravimeter |
M-Gravi |
31.12.2020 |
| Low temperature interconnection for PV upscaling |
Lotus |
31.12.2013 |
| Development of universal-functional submount blocks based on the "lift-off" technology with first application for MORES® sensors |
LIOF |
30.04.2014 |
| Development of a miniaturized photodiode sensor to detect solar intensity and angle for integration into window glass modules and facades for real-time control of blackout elements |
Light Control |
30.06.2022 |
| Large area diluted radiation detectors |
LAT |
31.07.2017 |
| Long-term stable front-side metallization based on environmentally friendly electroplated layers (LasVeGaS) - Subproject: Research into a long-term reliable and lead-free contacting technique for electrodeposited solar cells |
LasVeGas |
14.07.2014 |
| Direct laser imagesetter |
Laserdirektbelichter |
31.12.2016 |
| Laser-based planarization of contact surfaces on solar cells |
LaPlaKon |
30.06.2014 |
| Optischer Lagesensor mit hoher Stabiliät gegenüber Temperatur- und Feuchteeinflüssen |
LageIndikator |
30.11.2012 |
| Laser pulse beam shaping for selective ablation of functional layers |
LafosA |
30.06.2014 |
| Development of a coupling of optical and semiconductor-physical simulation environment using the example of a sensor network for beam position detection in laser material processing systems |
KOptHL |
28.02.2022 |
| Entwicklung eines kombinierten kardio-Temperatursensors für Langzeitüberwachung bei Risikogruppen |
KomKaT-Sens |
30.06.2012 |
| Compact refractive index and film thickness sensor |
KomBreSSe |
30.06.2015 |
| Components and modules for improved optical diagnostics |
KODIAK |
30.06.2023 |
| Capacitive microswitch for waking autonomous sensor systems |
KMS |
31.01.2014 |
| Development of a calibration chamber and/or sterilization chamber for substance sensors |
Kalika |
31.08.2016 |
| Optimized reactive bonding technology based on novel zirconium systems for use in microsystems technology |
JoinZiSi |
28.02.2023 |
| Innovative start metallizations for solderable microcontacts |
ISaBel |
31.12.2016 |
| Production-oriented introduction of a bonding process using integrated reactive metal layers |
iRMS |
31.07.2017 |
| Integrated reflectors for MEMS IR emitters |
IReMIS |
30.06.2021 |
| Intelligent development environment for flexible and fast microsensor prototyping |
Intelligente Entwicklungsumgebung |
31.01.2018 |
| Integrated piezoresistive silicon force sensors |
INKA |
30.11.2018 |
| Development of industrially suitable preconditioning for the passivation of high-efficiency Si solar cells |
InduPass |
30.06.2014 |
| Integrity-controlled compensated SoG silicon |
IKOSI |
30.04.2014 |
| Intelligent development environment for flexible and fast microsensor prototyping (II) |
IESP |
31.01.2019 |
| Innovative chip-to-chip connections for high-end system requirements |
I2CON |
31.07.2019 |
| Investigation of long-term stable joints for the assembly of pressure sensors for process monitoring in electrolyzers and system storage tanks |
HyProS-D |
30.03.2020 |
| High Performance Wafer-Level Packaging for Industrial Sensors |
HPPI |
31.03.2022 |
| Development of a high-temperature contacting technology for silicon-based electronics applications |
HoTSiL |
31.12.2014 |
| High temperature sensor technology |
HotSens |
31.10.2019 |
| High temperature pressure transducer |
HotDru |
30.06.2014 |
| Integrated drive circuit for high power UV source Source with integrated optics |
HL-UV-IV (IC4UV) |
30.11.2020 |
| Semiconductor Complex Measurement Station |
HKM |
30.11.2014 |
| Highly integrated and scalable interface circuits for quantum processors |
HIQuB |
31.08.2024 |
| High End Accelerometers |
HEB |
31.08.2023 |
| Novel hydrogen sensor with highest sensitivity and selectivity based on micro-electro-mechanical sensor structures |
H2MEMS |
31.12.2021 |
| High-precision piezoresistive angular rate sensor for autonomous offline navigation |
Gyros |
30.04.2022 |
| Glowing Body Silicon Emitter |
GloBSiE |
30.11.2018 |
| Targeted growth of synthetic diamond coatings for pressure sensors |
GeWaDiS |
31.10.2019 |
| Controlled defect dynamics in silicon for improved UV stability |
GeDeSi |
31.08.2019 |
| Galvanically isolated incremental sensor |
GalGIS |
30.09.2022 |
| Freezing out |
Freezing out |
30.09.2022 |
| Research Groups Solar; PIDSINX:H |
Forschergruppen Solar |
31.12.2014 |
| Flip chip assembly for building pressure sensors |
Flip-Chip-DDS |
31.01.2021 |
| FEM4MEMS - multi-physics finite element simulator for MEMS design |
FEM4MEMS |
30.09.2017 |
| Fiber-Chip-Package |
FCP |
31.01.2020 |
| Development of a PV module with conformity to EU standards with scope of validity microelectronics |
EU-KM |
30.09.2013 |
| European Micro Nano Broker Platform |
EU MN BROKER |
30.06.2013 |
| Development of a UV-LED absorption sensor for the determination of nucleic acid content and purity |
ENiN |
31.08.2019 |
| Energy efficiency measures |
Energieeffizienz |
31.12.2017 |
| Electromigration reduction of infrared emitters |
EMIR |
31.12.2021 |
| Electromigration in sensor contact systems |
EMIC |
30.09.2019 |
| Electrolysis system components for highly dynamic/intermittent operation TP2 Moisture as a controlled variable |
ElyKon |
31.12.2021 |
| Optoelektronischer Nivellierungssensor mit kombinierter visueller und opto-elektronischer Libelle |
Elise 3 |
31.12.2012 |
| Efficient coupling optics for single photon detectors |
EkoPHo |
30.04.2023 |
| Development of innovative joining technologies for the construction of highly stable pressure transmitters |
EFAH |
31.03.2023 |
| Development of a universal edge detector |
EdgeD |
31.12.2012 |
| Development of a desert climate test incl. sand abrasion for crystalline PV modules |
DUNE |
28.02.2015 |
| Pressure sensor chip, insensitive to time change of mechanical properties of the assembly and mounting technology |
DumBo |
30.06.2019 |
| Thin silicon diaphragm for highly stable and highly accurate silicon pressure sensors |
dSiM |
31.05.2017 |
| Next generation pressure sensors with SiCer technology |
DS-SiCer |
31.08.2022 |
| Pressure sensor made of <110> silicon increased linearity |
DS<110> |
31.12.2021 |
| Evaluation of printable material systems for IR emitters |
DruMa4IR |
30.09.2019 |
| Wireless sensor for harsh environmental conditions |
DRAU |
30.06.2014 |
| Doppelseitige, großflächig gedünnte Strahlungsdetektoren |
DLAT |
31.03.2020 |
| Thickness double metallization |
DiDoMet |
30.04.2020 |
| EUV irradiance via diamond-coated temperature sensors |
DiaTemp |
28.02.2019 |
| Standardizations in the production and processing of quantum materials using the example of NV color centers in diamond for the realization of a high-precision amperemeter diamond for electron detection based on quantum effects |
DiaQuantFab |
14.05.2022 |
| Diamond for electron detection |
DIAED |
30.09.2021 |
| Development of defect engineering processes in p-type silicon for fabrication of high-impedance n-in-p silicon detectors |
DeSiD |
31.08.2017 |
| Defect engineering to increase the beam hardness of low gain avalanche detectors |
DELGAD |
28.02.2022 |
| Si detectors with flat entrance window |
DefEin |
31.03.2022 |
| Ultrasound-based intraoral diagnostic platform for use in the dental field; Subproject 8: Assembly and packaging |
dc.sen |
30.06.2014 |
| Optimization of the Czochralski process for the production of monocrystalline silicon with regard to lower costs and thinner wafers - Subproject: Electrical and mechanical characterization of wafers and solar cells |
Cz-Sil |
30.06.2012 |
| Coriolis force based mems mass flow sensor for dosing in bio- and medical technology |
Coriolis MFS |
31.07.2015 |
| High-sensitivity low-noise blue-violet APD |
BVAPD |
31.05.2023 |
| Bubbleless tilt sensor with high accuracy |
BLNS |
30.06.2014 |
| Black Silicon |
Black Silicon |
30.04.2017 |
| Single-component sensor-actuator transducer with hybrid-integrated error compensation |
BioSAM |
31.12.2017 |
| Highly integrated optical disposable measuring cells with spectrophotometric measurement technology for online measurement of biological parameters |
BioFlowCell |
31.05.2019 |
| Development of an ear biofeedback system for the monitoring and treatment of vegetative dysfunctions; development of a miniaturized and mobile in-ear sensor module |
BioFeedback |
31.01.2015 |
| Lighting unit with integrated stabilization |
Belis |
31.12.2016 |
| Vital Monitoring - BDMon / In-Ear Sensor for Non-Invasive Beat-to-Beat Blood Pressure Monitoring |
BDMon |
30.06.2024 |
| Determination of the operating force of fasteners |
BAVI |
31.11.2020 |
| Multiphysical sensor for harsh environmental conditions |
Bat |
30.03.2020 |
| Analog, integrated temperature compensation for high temperature applications |
AnITHA |
28.02.2021 |
| Operating phase Application Center Microoptical Systems |
AMOS II |
31.12.2012 |
| Development of an ammonia sensor system for use in stationary inline measurement of ammonia content and a signal amplification option as well as a temperature management system with associated gas separator for optimum measurement conditions |
AmmoniaSense |
31.12.2023 |
| Actuator-based miniature spectrometer for gas sensor technology |
AMiGa |
31.12.2019 |
| Radon detector built with silicon alpha particle sensors |
ALPIN |
31.12.2020 |
| Development of a high-precision flush-mounted sensor with shortened detection time |
ALPHIN |
31.05.2022 |
| Absolute coded length measuring device for structural monitoring |
ALBau / ABCSmod |
30.06.2012 |
| Active Edges for Silicon Sensors |
Active Edges |
31.12.2016 |
| AC bridge |
AC-Brücke |
30.11.2018 |
| Impedimetric 3D sensors based on SOI wafers |
3DSOI |
30.06.2014 |
| Polarization compensated 3D spectral sensors |
3D-SpekSens |
31.12.2016 |
| 3D micro force sensor for quality assurance and tactile surfaces |
3D-Kraftsensor |
31.12.2016 |
| 3D etching process for MEMS sensors |
3D-ETCH |
30.06.2015 |
| Two-dimensional velocity measurement system with variable readout of grid periods |
2DIMVELO |
31.12.2012 |
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