Impedimetric 3D sensors based on SOI wafers
|German title:||Impedimetrische 3D Sensoren auf Basis von SOI Wafern|
|Duration:||1st January 2012 - 30th June 2014|
|Description:||The objective of this project was the realization of a relative humidity sensor, which is characterized by:
- improvement in terms of miniaturization and achievable resolution compared to the solutions available on the market
- significant increase in long-term stability, as swelling of the polymer no longer has a significant influence due to the geometric design of the sensor
- standardization of the connections with through-hole plating and hybrid design
The solution is to be based on SOI (silicon on insulator) wafers.
The basic concept of this sensor design is to measure the change in the relative permittivity of a polymer when moisture is absorbed from the surrounding atmosphere.
|Markets:||Mechanical Engineering, Metrology, Automation|
|Contact:||Contact us about this project via our business unit MEMS|
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