Modeling in microsystems engineering
Modeling and simulation are a prerequisite for targeted, efficient and resource-saving development in microsystems technology. The modeling of physical and technological interrelationships of silicon-based microsensors and devices as well as design processes based on them are the focus of this workshop.
Within the three areas
- Optical simulations for MOEMS
- Mechanical simulations for MEMS and
- Multidomain Modeling
different semiconductor-physical simulation tools as well as influences like the Hanbury-Brown effect or the characteristic curve calculation of piezo-resistive resistance bridges will be presented.
The workshop will take place as a hybrid event on September 26, 2023 at the CiS Research Institute in Erfurt. The organizer is CiS e.V.
Workshop language is German.
