Development trends in piezoresistive silicon pressure sensors
Micro-Electro-Mechanical Systems (MEMS) are a component of many products. Mostly made of silicon, they are tiny and form the basis of innovative solutions in electronics. The workshop will present new application possibilities of piezoresistive pressure sensors and pick up on trends in this field.
The possible applications of MEMS-based pressure sensors are broad and range from sensors for monitoring industrial plants and medical applications to sensor solutions for mobility and in the consumer sector as well as in science.
In this context, questions of long-term stability, use under harsh operating conditions as well as innovative assembly and connection technology are relevant.
The aim of the event is to present current results from research and development as well as applications for silicon-based MEMS sensors. The scope ranges from new materials such as SiCER, simulation, assembly and interconnection technology, metrological characterization to application.
The workshop will take place as a hybrid event on 13.10.2022 at the CiS Research Institute in Erfurt. The organizer is CiS e.V.
Workshop language is German!