Research and development from design to prototyping

We are your partner for product oriented research and development of new sensor solutions and microsystems based on silicon technologies. Customers benefit from our closed value chain from design to production. We focus on mechanic optoelectronic and capacitive microsystems for industrial application and radiation detectors for science and research.

Save the date - trade fairs in 2020

SPIE Photonics West -
01.-06. February in San Francisco, USA

Sensor China - 23.-25. September in Shanghai, China

electronica - 10.-13. November in Munich, Germany

COMPAMED - 16.-19. November in Düsseldorf, Germany


Construction of complex miniaturized force sensor systems joined using glass solder

The CiS Forschungsinstitut uses its own piezoresistive, miniaturised silicon strain sensors (Si-DMS) with an integrated full bridge for hybrid force sensors. Glass solder bonding is used to join the Si strain gauges on the spring body at 90° to each other [learn more]

Silicon Science Award presented

Our employee Dr. Robert Täschner was awarded the Silicon Science Award for his dissertation "Process and sensor development for production-ready silicon-based pressure sensor systems suitable for high temperatures". The CiS e.V. awards this prize for outstanding scientific achievements in the field of microsystems technology [learn more]

Miniaturized InfraRed Emitter Chip (MIREC)

With a new plasma-assisted etching process, a thin functional membrane and a break trench are simultaneously created for the following chip separation. In MEMS IR emitters, this results in more than a factor of 4 smaller areas and a dynamic range that is 2 times higher than that of the current state of the art [learn more]

Better safe than sorry - flange seal monitoring

Permanently safe flanged joints are the basic requirements for stable production processes and work at a high safety level. Recently developed silicon-based MEMS sensors are applied to bolt heads and measure their deformation due to changes in the preload force [learn more]

Sensitive fluorescence sensors in cube sugar format

Sensitive fluorescence sensors in lump sugar format - Modern fluorescence sensors should be small, high-resolution and highly sensitive, inexpensive and robust. In the SmartFLU research project, the CiS Forschungsinstitut is developing a technological construction kit for a 2-channel fluorimeter [learn more]

Intelligent development environment for flexible and fast microsensor prototyping

With the support of the European Union within the framework of the European Regional Development Fund (EFRE), the CiS Forschungsinstitut is establishing an intelligent development environment for flexible and fast microsensor prototyping that enables permanent, largely automated parameter acquisition and control in the course of microsystem prototype production [Show info]

Supported by the Free State of Thuringia with funds from the European Social Fund

Supported by the European Social Fund, CiS is preparing to modernise its infrastructure in order to be fit for future research and development activities [show info]

01.10.2020 - 02.10.2020:
CiS Quantum Workshop: Workshop on Applied Quantum Technologies
Erfurt, Germany [+Cal]
CiS MOEMS Workshop: Komponenten für die NDIR-Sensorik
Erfurt, Germany [+Cal]
18. Windmesse Symposium
Hamburg, Germany [+Cal]
CiS MEMS Workshop: Drucksensorik
Erfurt, Germany [+Cal]
10.11.2020 - 13.11.2020:
Electronica 2020
München, Germany [+Cal]

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