Research and development from design to prototyping

We are your partner for product oriented research and development of new sensor solutions and microsystems based on silicon technologies. Customers benefit from our closed value chain from design to production. We focus on mechanic optoelectronic and capacitive microsystems for industrial application and radiation detectors for science and research.

Happy new year!

... the New Year begins no less turbulent! We start highly motivated and with you we want to master the challenges that are set.
Together we are looking forward to a time that makes personal encounters possible again.
For the New Year we wish you all the best, business success - and stay healthy.


With booth at HM21 Digital Edition

This week at HM21 Digital Edition, we present current research topics and project results in the development of silicon-based MEMS and MOEMS sensor concepts [learn more]

Happy Easter - Creative competition for the children of our employees

The management of the CiS Research Institute invited to a creative participation action for the children of our employees. In our online gallery you can admire the numerous creative submissions of the young artists. Happy Easter days and stay healthy [learn more]

First Status Workshop of the BMBF Growth Core HIPS

The 1st status workshop of the BMBF growth core HIPS will take place on April 7, 2021 as a free online event. Organized by the host TU Ilmenau, guests and interested parties are welcome from 9:00 to 16:30. The CiS Research Institute is involved in two projects to develop an innovative multi-sensor platform for capturing sensor information in challenging environments [learn more]

Further development of the "ultra-wideband microwave sensor technology" foundation project

The CiS Research Institute uses its competences in packaging and interconnection technology for the further development of the founding project of Ilmsens GmbH. Processes such as chip-to-chip contacts with extremely short and flat loops as well as long-term stable, hermetic packaging drive the miniaturization of the "system-in-package" sensor [learn more]

H2MEMS - Novel hydrogen sensor with highest sensitivity and selectivity based on silicon-based MEMS sensor structures

As a specialist in the development of silicon-based pressure sensors, the CiS Research Institute is developing and testing palladium-coated MEMS structures with its partners in the H2MEMS project. The volume expansion of palladium during hydrogen deposition is being tested as a measuring principle [learn more]

SPIE Photonics West 2021 as an online event


This year's SPIE Photonics West will take place as an online-only event. From March 6 to 11, registered attendees will have access to more than 3,000 presentations within the BiOS 2021, LASE 2021, OPTO 2021, and Quantum West 2021 conferences. CiS Research Institute will be present at OPTO 2021 with two presentations on "Factors influencing the emission characteristics of UV LED chips: The modular system for module optimization" and "Integrated digitally adjustable step-down converter to control one individual or a series of UV-LED(s)". We very much hope to be back in San Francisco next year with a booth and new exciting topics.

Learn more about our contributions at OPTO 2021 here:



NanoSense - Development of a hardness measuring head based on a novel combined force-displacement sensor

For the determination of surface hardness in the nanometer range, a new measuring head combining a force and displacement sensor is being developed in the recently launched "NanoSense" project. It is to be connected modularly to common universal testing machines and XY-axis manipulators [learn more]

Intelligent development environment for flexible and fast microsensor prototyping

With the support of the European Union within the framework of the European Regional Development Fund (EFRE), the CiS Forschungsinstitut is establishing an intelligent development environment for flexible and fast microsensor prototyping that enables permanent, largely automated parameter acquisition and control in the course of microsystem prototype production [Show info]

Supported by the Free State of Thuringia with funds from the European Social Fund

Supported by the European Social Fund, CiS is preparing to modernise its infrastructure in order to be fit for future research and development activities [show info]

12.04.2021 - 16.04.2021:
online, Germany [+Cal]
18.04.2021 - 21.04.2021:
online, Germany [+Cal]
27.04.2021 - 28.04.2021:
W3+ Fair & Convention
Wetzlar, Germany [+Cal]
27.04.2021 - 29.04.2021:
Smart Systems Integration
online, Germany [+Cal]
03.05.2021 - 06.05.2021:
SMSI 2021 - Sensor and Measurement Science International
online + Nürnberg, Germany [+Cal]

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