Research and development from design to prototyping

We are your partner for product oriented research and development of new sensor solutions and microsystems based on silicon technologies. Customers benefit from our closed value chain from design to production. We focus on mechanic optoelectronic and capacitive microsystems for industrial application and radiation detectors for science and research.


5th Industry Innovation Dialogue

The 5th Industrial Innovation Dialogue highlights current research competencies of quantum technologies for the Thuringian economy. Mario Bähr from the CiS Forschungsinstitut will present diamonds as a cost-efficient quantum material and report on results from the research project DiaQuantFab [learn more]

8th GMM Workshop Micro-Nano-Integration 2020

In the context of the 8th GMM Workshop Micro-Nano-Integration 2020 the CiS Forschungsinstitut will be represented with two exciting short lectures. The online conference is organized by the VDE/VDI Society for Microelectronics, Microsystems and Precision Engineering in cooperation with Ruhr-University Bochum [learn more]

SiCer technology discussion of the BMBF growth core HIPS - High Performance Sensor Technology

Thuringia's industrial companies and research institutes are working together in the HIPS growth core to develop new high-performance sensors based on the already patented SiCer technology and to market them jointly in the future. SiCer technology stands for a unique combination of silicon technology (Si) with ceramic multilayer technology (Cer) [learn more]

Construction of complex miniaturized force sensor systems joined using glass solder

The CiS Forschungsinstitut uses its own piezoresistive, miniaturised silicon strain sensors (Si-DMS) with an integrated full bridge for hybrid force sensors. Glass solder bonding is used to join the Si strain gauges on the spring body at 90° to each other [learn more]

Silicon Science Award presented

Our employee Dr. Robert Täschner was awarded the Silicon Science Award for his dissertation "Process and sensor development for production-ready silicon-based pressure sensor systems suitable for high temperatures". The CiS e.V. awards this prize for outstanding scientific achievements in the field of microsystems technology [learn more]

Miniaturized InfraRed Emitter Chip (MIREC)

With a new plasma-assisted etching process, a thin functional membrane and a break trench are simultaneously created for the following chip separation. In MEMS IR emitters, this results in more than a factor of 4 smaller areas and a dynamic range that is 2 times higher than that of the current state of the art [learn more]

Intelligent development environment for flexible and fast microsensor prototyping

With the support of the European Union within the framework of the European Regional Development Fund (EFRE), the CiS Forschungsinstitut is establishing an intelligent development environment for flexible and fast microsensor prototyping that enables permanent, largely automated parameter acquisition and control in the course of microsystem prototype production [Show info]

Supported by the Free State of Thuringia with funds from the European Social Fund

Supported by the European Social Fund, CiS is preparing to modernise its infrastructure in order to be fit for future research and development activities [show info]