We are your partner for industrial research and development of silicon-based sensors.
You benefit from our many years of experience in development and manufacturing. We offer a closed in house value chain from design to manufacturing.
Main areas of activity are MEMS and MOEMS with highest stability and reliability.
You will receive adapted customized solutions for your sensor systems, as well as small series manufacturing and reliability and lifetime qualification.
CiS Forschungsinstitut für Mikrosensorik GmbH is certified according to DIN EN ISO 9001:2015
News
Launch of the aQuSiS Project: Acceptor-Based Quantum Systems in Silicon12. May 2026Color centers such as the G- or T-center in silicon are currently used as the building blocks for silicon-based quantum technology. The aQuSiS research project aims to realize indium-based acceptor defects as readily accessible quantum systems for the first time. The increased understanding of the structure and functioning of this elementary quantum building block could serve as the foundation for its continued integration into modern quantum technologies [Read more]
Project Completion NH3-BZ: Photoacoustic Sensor for Hydrogen Production6. May 2026The sensing cell is designed to determine the residual ammonia content in a dry N₂/H₂ gas mixture—a blend of nitrogen (N₂) and hydrogen (H₂) containing 75% hydrogen by volume—and is intended to enable real-time monitoring. The developed solution is based on innovative thermal emitters and operates without a chopper. Custom sensor elements can be quickly integrated [Read more]
CiS Research Institute Returns as an Exhibitor at Quantum Photonics29. April 2026On 5th and 6th May 2026, the CiS Research Institute will present its portfolio of quantum technologies at Booth 615 in Hall 2 at the Erfurt Trade Fair. Dr. Mario Bähr, a researcher at the CiS Research Institute, will speak on “Enabling Technologies for Quantum Applications” during a coffee pitch on Tuesday at 15:15 [Read more]
Technologies for the Future: CiS Research Institute at the 2026 Hannover Messe20. April 2026Over the next five days, our experts will be showcasing new project results and applications of silicon-based MEMS and MOEMS sensor concepts in Hall 13 at the LEG’s Thuringian joint booth (Booth E24) in Hanover [Read more]
Plenary presentation at the 5th Symposium on Electronics and System Integration8. April 2026The 5th Symposium on Electronics and System Integration at Landshut University of Applied Sciences will kick off on 15th April 2026, with three plenary presentations. In one of the presentations, Toni Schildhauer of the CiS Research Institute will discuss the topic "MEMS-IR Emitters: From Digital Twins to Novel Connection Techniques and Standardized Measurement Protocols." [Read more]
| Events |
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| 08.06.2026 - 12.06.2026: Defects in Solids for Quantum Technologies Budapest, Hungary [+Cal] |
| 09.06.2026 - 11.06.2026: SENSOR+TEST Nuremberg, Germany [+Cal] |
| 09.06.2026 - 10.06.2026: 23. ITG/GMA-Fachtagung "Sensoren und Messsysteme 2026" Nuremberg, Germany [+Cal] |
| 21.09.2026 - 24.09.2026: ESREF 2026 - 37th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis Vienna, Austria [+Cal] |
| 27.09.2026 - 02.10.2026: GADEST 2026 San Servolo, Italy [+Cal] |
| [show all events] |
