Research and Development from Design to Prototyping

We are your partner for industrial research and development of silicon-based sensors.
You benefit from our many years of experience in development and manufacturing. We offer a closed in house value chain from design to manufacturing.

Main areas of activity are MEMS and MOEMS with highest stability and reliability.
You will receive adapted customized solutions for your sensor systems, as well as small series manufacturing and reliability and lifetime qualification.

CiS Forschungsinstitut für Mikrosensorik GmbH is certified according to DIN EN ISO 9001:2015

News

  • Photoacoustic gas sensors with reference gas sensor
    The focus of the completed PAS research project was the development of a piezoresistive microphone component based on micromechanical systems (MEMS) for highly integrated photoacoustic gas sensors. The sensor is suitable for an application range from -40⁰C to 140⁰C. Applications are in the field of climate and environmental protection to improve energy management, air quality testing or in medical technology as highly sensitive breathing gas sensors. [Read more]
  • Defect mechanisms in silicon – Lectures at the DPG Spring Conference in Berlin
    From 17th-22nd March 2024, the Sektion Kondensierte Materie (SMK) of the Deutsche Physikalische Gesellschaft e. V. (DPG) together with its specialist associations and working groups is organizing the DPG Spring Conference on the campus of the Technical University of Berlin. In four contributions, Dr. Kevin Lauer and young researchers will present their latest scientific results on various defect mechanisms in silicon at different doping levels and invite discussion [Read more]
  • Evaluation of quantum materials in industrial pressure sensors
    At the CiS Research Institute, pressure sensors based on NV centers in diamond were produced using industrial manufacturing methods in cooperation with partners from industry and science. The results of the Qind research project will be presented at the 28th Hasselt Diamond Workshop SBDD [Read more]
  • Innovative isothermal sensor with front cavities
    In the completed NIVo research project, a new thermopile sensor was developed that works on the principle of isothermal detection of infrared radiation and is exempt from the front side. This combination enables the production of a new type of high-performance sensor in the field of thermography [Read more]
  • Member meeting OptoNet Live – The CiS Research Institute introduces itself
    As a long-standing member of OptoNet e.V., we are taking the opportunity to introduce ourselves to the members of the Photonics Network Thuringia at the virtual members' meeting on Monday, 19th February 2024. Dr. Martin Schädel, Head of Business Unit MOEMS, will present the institute as a partner for production-oriented research and development of new sensor solutions and microsystems based on silicon technologies [Read more]
Events
17.03.2024 - 22.03.2024:
DPG Frühjahrstagung
Berlin, Deutschland [+Cal]
19.03.2024 - 20.03.2024:
EASS 2024 - Energieautonome Sensorsysteme
Freiburg, Deutschland [+Cal]
22.04.2024 - 26.04.224:
Hannover Messe
Hannover [+Cal]
24.04.2024 - 25.04.2024:
QNC Summit & FMD Innovation Day 2024
Berlin, Deutschland [+Cal]
27.04.2024 - 04.05.2024:
ICQMT 2024 - International Conference on Quantum Materials and Technologies
Ölüdeniz, Türkei [+Cal]
[show all events]