On his tour of the trade fair on 22.04.2024 as part of the Hannover Messe, Thuringian Minister President Bodo Ramelow and Christoph Eggers, Head of Division in the Thuringian State Chancellery, visited our exhibition at the LEG Thüringen joint stand in Hall 3, Stand D76. Dr. Klaus Ettrich, Head of the MEMS Business Unit, and Dr. Thomas Frank, Head of the MEMS Department, explained the CiS Research Institute's portfolio to the guests and demonstrated the latest research results [Read more]

During the Hannover Messe, which starts next week, the CiS Research Institute will be presenting an electrically isolated incremental sensor at the joint Thuringian stand in Hall 3, Stand D76. As part of the GalGiS funding project, new silicon technologies have been developed to achieve such galvanic isolation at chip level [Read more]

The newly launched Pack-Flu project deals with the design, realization and characterization of a robust and innovative packaging platform for low-cost MEMS-based microcalorimetric flow sensors for use in gas pipelines or ventilation systems. The platform serves as a scalable basis for flow sensors for analyzing and controlling air flow, hydrogen and other non-aggressive gases with known flow direction (e.g. in pipelines) with high accuracy [Read more]

With the MinerVa project, the CiS Research Institute is launching the development of a MEMS Pirani sensor for pressure measurement in the fine high vacuum range. The potential applications are diverse, for example in the production of thin functional layers using physical vapor deposition (PVD) [Read more]

Once again this year, the management of the CiS Research Institute invited employees to take part in a creative hands-on activity during the Easter period. The children of all employees were invited to submit self-drawn pictures of the Easter bunny or Easter crafts by today. Each participating child received a sweet surprise as a reward. The numerous creative submissions from the young artists can be admired in our online gallery. [Read more]