Research and Development from Design to Prototyping

We are your partner for industrial research and development of silicon-based sensors.
You benefit from our many years of experience in development and manufacturing. We offer a closed in house value chain from design to manufacturing.

Main areas of activity are MEMS and MOEMS with highest stability and reliability.
You will receive adapted customized solutions for your sensor systems, as well as small series manufacturing and reliability and lifetime qualification.

CiS Forschungsinstitut für Mikrosensorik GmbH is certified according to DIN EN ISO 9001:2015


  • Healyan GmbH wins ThEx AWARD 2023 in the “Founding” category with innovative “Strobes” stroboscopic glasses
    Healyan GmbH wins the ThEx AWARD 2023 in the "Start-ups" category with its innovative "Strobes" stroboscopic glasses. The successful implementation of this idea was realized in close cooperation with the CiS Research Institute and thus supported the rapid market maturity of the product. We would like to congratulate Philipp Caspari and his colleagues at Healyan on this award and wish them every success for the future [Read more]
  • GREAT H2 final conference and green hydrogen in the industry
    As part of the GREAT H2 final conference, the CiS Research Institute is presenting sensor developments for the industrial application of green hydrogen. In his pitch, Dr. Klaus Ettrich, Head of the MEMS Business Unit at CiS Research Institute, will explain sensor solutions for safe use along the entire value chain of "green hydrogen". Demonstrators from corresponding research projects will be on display at the trade exhibition [Read more]
  • Project start: Inkan – Innovative sensor cooling system for dosimeters
    The newly launched project "Inkan - Innovative sensor cooling system for dosimeters" by the CiS Research Institute addresses the development of non-invasive dosimeters for measuring radiation doses in medical X-ray diagnostics. In contrast to conventional dosimeters, which are operated at room temperature, the aim here is to achieve an operating temperature of around minus 10 degrees Celsius [Read more]
  • New generation of IR emitters and Si strain gauges with a high K-factor
    From 13th to 16th November 2023, the COMPAMED, the world's leading trade fair for the medical technology supply sector, will open its doors in Düsseldorf and we will be presenting applications of silicon-based sensor technology in medical technology at our booth H23-4 in hall 8A within the joint stand of the IVAM trade association. As part of the COMPAMED HIGH-TECH Forum by IVAM, Dr. Martin Schädel, Business Unit Manager MOEMS, will present selected research and development results on the topic of "Silicon-based microsensors for medical and life science applications" on 13th November [Read more]
  • Project start: QuBS – Quantum mechanical device simulation
    Various simulation strategies and models are used in the development of modern microsystems technology. In the new QuBS project, preliminary research is being carried out to improve the design and properties of MEMS components by means of simulation. Quantum mechanical modelling is used to describe the physical behaviour of the components [Read more]
29.11.2023 - 30.11.2023:
Dünnschichtmesstechnik Seminar und Workshop
Berlin, Deutschland [+Cal]
27.01.2024 - 01.02.2024:
SPIE Photonics West 2024
San Francisco, USA [+Cal]
[show all events]