
FIRE project completion: Fast infrared emitters as monolithically integrated arrays
/in IR, MOEMSThe central idea of integrating several small and therefore fast active areas into a single chip was initially achieved through the hybrid integration of individual, very small (1×1 mm²) chips, which were ultimately converted into variants of monolithically integrated arrays
Project launch Thermistor-HFS – Development of a novel heat flux sensor
/in Simulation & DesignThe new Thermistor-HFS research project aims to develop and manufacture a novel heat flow sensor based on a fundamentally different technological approach than solutions already available on the market
Project completion Optimization of Thermal Behavior (OTB)
/in MEMS, PressureIn the OTB project, scientists at the CiS Research Institute pursued the goal of reducing or optimizing cross-sensitivity for highly stable and highly accurate piezoresistive resistance bridges consisting of resistance tracks implanted in single-crystal silicon with a high temperature coefficient
Wound Light wins award in photo competition
/in AnalyticsWith his photo “Aufgewundenes Licht” (Wound Light), our colleague Bernd Sprenger won third place in this year’s “NanObjectives 5.0” photo competition. His photo, taken with a scanning electron microscope at 100x magnification, shows a coiled filament in a standard household light bulb. We warmly congratulate our colleague Bernd Sprenger on his success
International conference on superconducting electronics and quantum technologies takes place in Erfurt
/in Events, MEMS, MOEMS, QuantumThe International Superconductive Electronics Conference (ISEC), the biennial scientific conference that brings together global experts in the field of superconductive electronics in a forum, kicked off in Erfurt on Monday. The international series of events is being held at the Radisson Blu Hotel Erfurt until Thursday and covers key topics for the future, such as quantum computers and energy-efficient electronics, and provides a forum for innovations in science and industry
Trade fair premiere at EPHJ 2025 in Geneva
/in Events, MEMS, MOEMSStarting tomorrow, the CiS Research Institute will be presenting its portfolio for the first time at EPHJ, an international trade fair for high precision in Geneva. Until 6th June 2025, we will be presenting our silicon-based sensor technologies and expertise in the field of MEMS and MOEMS to an international audience of experts at booth J122 in the Palexpo halls in Geneva
Practical microsensor technology – medical technology students visit the research institute
/in Analytics, Events, Medical technology, MEMS, MOEMSDuring a visit by students from KOMET (Conference of Medical Technology Student Councils from German-speaking Countries) on May 26, 2025, they were able to gain a small insight into our fascinating world of microsensor technology. MEMS Business Unit Manager Dr. Klaus Ettrich presented a selected range of sensor developments for medical applications. Dr. Bernd Hähnlein generated enthusiasm and practical relevance at the scanning electron microscope of the CiS Analytics Competence Center with the finest structures that are invisible to the naked eye
State Secretary for Economic Affairs Mario Suckert visits the CiS Research Institute
/in PoliticsMario Suckert, State Secretary for Economic Affairs at the Thuringian Ministry of Economic Affairs, Agriculture, and Rural Areas, visited the CiS Research Institute today. Thomas Brock, Managing Director of the CiS Research Institute, presented current research results and their application in industry. During the discussion, he also referred to the important role of business-oriented research institutions in the realization of innovative ideas from SMEs
Freezing-out effect – Presentation at the microTEC Cluster Conference 2025
/in Events, MEMSOn May 20, 2025, at 3:15 p.m., Dr. Klaus Ettrich will provide insights into current research findings on the topic of “Semiconductor components at cryogenic temperatures for hydrogen applications” as part of the “Smart Materials” panel