Precise temperature sensors for the cryogenic temperature range are an essential prerequisite for numerous future technologies. They are used, among other things, in superconducting quantum systems, space exploration, and low-temperature research, where even the slightest temperature deviations can affect the performance and reliability of complex systems. The development of sensors that are both highly accurate and stable over the long term therefore makes an important contribution to the advancement of modern measurement and sensor technology. As part of this new research project, a cryogenic temperature sensor based on semiconductor resistors is being developed for the temperature range between 8 K and 50 K. An innovative manufacturing approach involves the integration of magnets at the wafer level, which is intended to improve the sensor’s ability to derive a variably adjustable temperature reference point. Following a one-time initial calibration, this reference point enables, among other things, the in-situ calibration of an additional, integrable temperature sensor. The goal of the research project is to develop a highly precise and long-term stable sensor system that reduces the calibration effort and improves measurement accuracy under cryogenic conditions.
The research and development work described here was funded by the Federal Ministry for Economic Affairs and Energy (BMWE) as part of the CryoMAG-RX research project.
Funding code: 49MF260035
