The aim of the new Flunder research project is to investigate how suitable measures can be taken to minimize the temperature dependence of the measurement signal in hybrid monocrystalline silicon strain gauge sensors (SiDMS)
The UDM research project is aimed at the development and prototype production of piezoresistive absolute pressure sensors with ultra-small dimensions yet very high sensitivities based on single-crystal MSTS membranes
In the BerNieDru research project that has been launched, a piezoresistive pressure sensor is to be developed for the pressure range up to 2 mbar, which can withstand a burst pressure of at least 1 bar by adapting the membrane geometry
The aim of the new “DMS in ceramics” project is to develop a process for a differential pressure sensor with a media-resistant ceramic bending plate and integrated Si-DMS. By fully integrating the Si strain gauge during the lamination of the Low Temperature Co-fired Ceramics (LTCC), it is hermetically sealed and protected against mechanical manipulation
In the newly launched M2NL project, a development team at the CiS Research Institute is analyzing measurement data from various piezoresistive pressure sensors and wants to use the analysis results to calculate mechanical parameters and their temperature dependency. The aim is to investigate non-linear effects and their influence in the simulation using the FEM tool ANSYS Multiphysics
From 11th to 13th June 2024, we look forward to an inspiring dialog with you at our booth at the SENSOR+TEST in Nuremberg. We will present current research results in the development of very high-resolution capacitive MEMS acceleration sensors for inclination and leveling measurements as well as special tandem diodes for a compact standing wave interferometer. The 22nd GMA conference will take place at the same time. Here, the CiS Research Institute will present a diamond-based pressure sensor concept and give a second lecture on fast IR MEMS emitters for NDIR applications
Various simulation methods can be used for the development of piezoresistive pressure sensors. The aim of the mMoDS research project is to describe the system model using modular sub-models in order to enable an efficient design process that takes into account different design and technological variants, thereby reducing the number of detailed, computationally intensive FEM simulations
The aim of the LaWaDos research project is to produce high-temperature-stable contact metallizations for wire bonding contacts on sensor elements that allow better monitoring of thermal processes
The newly launched Pack-Flu project deals with the design, realization and characterization of a robust and innovative packaging platform for low-cost MEMS-based microcalorimetric flow sensors for use in gas pipelines or ventilation systems. The platform serves as a scalable basis for flow sensors for analyzing and controlling air flow, hydrogen and other non-aggressive gases with known flow direction (e.g. in pipelines) with high accuracy
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99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
