With the MinerVa project, the CiS Research Institute is launching the development of a MEMS Pirani sensor for pressure measurement in the fine high vacuum range. The potential applications are diverse, for example in the production of thin functional layers using physical vapor deposition (PVD)
The project dealt with the development of capacitive accelerometers with a resolution of 0.001⁰ based on chip-level processes. The main features are a significantly increased seismic mass, a laterally arranged differential capacitor and a hermetic package
The focus of the completed PAS research project was the development of a piezoresistive microphone component based on micromechanical systems (MEMS) for highly integrated photoacoustic gas sensors. The sensor is suitable for an application range from -40⁰C to 140⁰C. Applications are in the field of climate and environmental protection to improve energy management, air quality testing or in medical technology as highly sensitive breathing gas sensors.
As part of the ZIM cooperation project NanoSense, the CiS Forschungsinstitut, together with two other partners, developed a measuring head for hardness measurement for integration into universal testing machines and xy manipulators, in which the measuring distance and measuring force are in line with each other
In order to improve the performance of piezoresistive pressure sensors, various joining technologies were developed in the completed EFAH research project, which focused in particular on the critical connections between the transducer core and the electrical-mechanical process connection. Glass solders showed clear advantages here
As part of the GREAT H2 final conference, the CiS Research Institute is presenting sensor developments for the industrial application of green hydrogen. In his pitch, Dr. Klaus Ettrich, Head of the MEMS Business Unit at CiS Research Institute, will explain sensor solutions for safe use along the entire value chain of “green hydrogen”. Demonstrators from corresponding research projects will be on display at the trade exhibition
From 13th to 16th November 2023, the COMPAMED, the world’s leading trade fair for the medical technology supply sector, will open its doors in Düsseldorf and we will be presenting applications of silicon-based sensor technology in medical technology at our booth H23-4 in hall 8A within the joint stand of the IVAM trade association.
As part of the COMPAMED HIGH-TECH Forum by IVAM, Dr. Martin Schädel, Business Unit Manager MOEMS, will present selected research and development results on the topic of “Silicon-based microsensors for medical and life science applications” on 13th November
Various simulation strategies and models are used in the development of modern microsystems technology. In the new QuBS project, preliminary research is being carried out to improve the design and properties of MEMS components by means of simulation. Quantum mechanical modelling is used to describe the physical behaviour of the components
The 10th MikroSystemTechnik Congress starts today. Dr Thomas Frank, head of the MEMS department at the CiS Research Institute, will be presenting selected results of research and development projects in various lecture and poster sessions in Dresden
As a member of the board of the sensor cluster detect (SensorikNet e.V.) and managing director of the CiS Research Institute for Microsensorics, Prof. Thomas Ortlepp will give a talk today in the session “Smart Home – Sensor Technology” at the symposium “Sensorik im Wandel”. The event is the first joint initiative of the IVAM Microtechnology Association and the Thuringian Sensor Cluster “detect”
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