MEMS – Page 3

Silicon-based MEMS sensor technology: Trends and applications – the MEMS Workshop 2025

24. September 2025/in Events, MEMS

Experts from research and industry met in Erfurt on September 17, 2025, to discuss current topics and innovations in silicon-based MEMS technologies. The exciting contributions from industry and science provided inspiration for intensive discussions during breaks and new contacts. The workshop once again confirmed the importance of MEMS technologies for future industrial developments and demonstrated concrete applications

MEMS IR emitter development using digital twins – CiS Research Institute exhibits at the 17th Erfurt Technology Dialogue

28. August 2025/in Events, IR, MEMS, MOEMS, Politics

Under the motto “Digital twins in sustainable production,” representatives from business, research, and politics met at the Comcenter Brühl on 27th August 2025, for the 17th Erfurt Technology Dialogue.
In the accompanying exhibition, the CiS Research Institute presented part of its research and service portfolio as well as results from the FIRE research project

Development of a high-pressure sensor up to 300 MPa with front-flush media connection

23. July 2025/in MEMS, Packaging, Pressure

The ambitious goal of the research project was achieved with the successful development of a silicon-based high-pressure sensor with front-flush media contact for a measuring range up to 300 MPa. The front-flush media connection makes the sensor ideal for sensitive areas with strict hygiene regulations, such as in the food industry or pharmaceuticals

Project completion Optimization of Thermal Behavior (OTB)

2. July 2025/in MEMS, Pressure

In the OTB project, scientists at the CiS Research Institute pursued the goal of reducing or optimizing cross-sensitivity for highly stable and highly accurate piezoresistive resistance bridges consisting of resistance tracks implanted in single-crystal silicon with a high temperature coefficient

International conference on superconducting electronics and quantum technologies takes place in Erfurt

17. June 2025/in Events, MEMS, MOEMS, Quantum

The International Superconductive Electronics Conference (ISEC), the biennial scientific conference that brings together global experts in the field of superconductive electronics in a forum, kicked off in Erfurt on Monday. The international series of events is being held at the Radisson Blu Hotel Erfurt until Thursday and covers key topics for the future, such as quantum computers and energy-efficient electronics, and provides a forum for innovations in science and industry

Trade fair premiere at EPHJ 2025 in Geneva

2. June 2025/in Events, MEMS, MOEMS

Starting tomorrow, the CiS Research Institute will be presenting its portfolio for the first time at EPHJ, an international trade fair for high precision in Geneva. Until 6th June 2025, we will be presenting our silicon-based sensor technologies and expertise in the field of MEMS and MOEMS to an international audience of experts at booth J122 in the Palexpo halls in Geneva

Practical microsensor technology – medical technology students visit the research institute

30. May 2025/in Analytics, Events, Medical technology, MEMS, MOEMS

During a visit by students from KOMET (Conference of Medical Technology Student Councils from German-speaking Countries) on May 26, 2025, they were able to gain a small insight into our fascinating world of microsensor technology. MEMS Business Unit Manager Dr. Klaus Ettrich presented a selected range of sensor developments for medical applications. Dr. Bernd Hähnlein generated enthusiasm and practical relevance at the scanning electron microscope of the CiS Analytics Competence Center with the finest structures that are invisible to the naked eye

Freezing-out effect – Presentation at the microTEC Cluster Conference 2025

19. May 2025/in Events, MEMS

On May 20, 2025, at 3:15 p.m., Dr. Klaus Ettrich will provide insights into current research findings on the topic of “Semiconductor components at cryogenic temperatures for hydrogen applications” as part of the “Smart Materials” panel

From research to practice – contributions from the CiS Research Institute at SMSI 2025

6. May 2025/in Events, Measurement, MEMS, MOEMS

Parallel to the Sensor+Test trade fair in Nuremberg from May 6 to May 8, 2025, the 3rd Sensor and Measurement Science International (SMSI) Conference will take place at the Congress Center Nuremberg. The CiS Research Institute will be represented with nine scientific contributions

Silicon-based sensor technology at Sensor+Test 2025 in Nuremberg in early May

24. April 2025/in Events, MEMS, MOEMS

From May 6-8, 2025, the CiS Research Institute will present its current portfolio at Sensor+Test in Nuremberg. Interested visitors can find us in Hall 1 at our booth 501 in the Nuremberg Exhibition Center. Information about our highlights in the field of silicon-based sensor technology for customer-specific developments and applications is available for download and review