From materials research to software development: Discover STEM careers in a practical setting at the CiS Experiment Day
/in Events, MEMS, MOEMSOn 29th January 2026, around 40 students from the “Am Schwemmbach” cooperative comprehensive school in Erfurt visited the CiS Research Institute for Microsensor Technology to explore the world of scientific and technical professions
NivLer – a retrofittable solution for process pressure monitoring
/in Events, MEMSIn the completed NivLer project, the CiS Research Institute developed a non-invasive retrofit solution for monitoring pipe systems in industry. The retrofittable sensor supports data-based maintenance optimization through early detection of wear and tear and is also suitable for use in areas with high hygiene requirements, such as pharmaceutical and food production
VACOM receives Thuringia Innovation Award 2025 for miniaturized vacuum sensor CASSINI
/in Measurement, MEMSVACOM wins the Thuringian Innovation Award 2025 and sets new technological standards with its new miniaturized vacuum sensor CASSINI. The scientific and technological basis for the microelectromechanical system (MEMS) was laid in joint research projects with the CiS Research Institute
Project completion KTB: Complex tools for component simulation
/in MEMS, PressureIn the KTB project, various programs were combined into a complex simulation tool for the development of high-precision and long-term stable pressure sensors in order to simulate the characteristic curves of MEMS components, enabling a continuous simulation process
Start of ZEBA project: Non-destructive image evaluation using AI-supported imaging to determine burst pressure
/in MEMS, PressureThe new “ZEBA” research project is investigating image-property relationships and developing an AI-supported process flow that can be integrated into the manufacturing process and provides non-destructive information about the expected burst pressure of individual chips
Debut at the Precision Fair in the Netherlands
/in Events, Force, IR, MEMS, MOEMS, PressureOn 12th and 13th November 2025, the 24th Precision Fair will take place at the Brabanthallen in ‘s-Hertogenbosch. The CiS Research Institute for Microsensor Technology will be exhibiting for the first time at the joint stand of LEG -Thüringen in hall 6, booth202
Four poster presentations at the MicroSystem Technology Congress 2025
/in Events, MEMS, MOEMS, Simulation & DesignUnder the motto “Change through Progress,” the MicroSystem Technology Congress 2025 kicks off today in Duisburg. At the 11th edition of the congress, the CiS Research Institute is presenting a selection of its research results in four posters from the fields of simulation, strain gauges, and IR emitters
Project launch for the development of Si pressure transducers with glass-ceramic components (ADAM)
/in MEMS, PressureThe ADAM research project aims to improve the properties of pressure sensors, such as chemical resistance and operating temperature, through the use of glass-ceramic components. This requires the optimization of joining techniques, which are being extensively tested
Project launch PaRiS – Polysilicon-based resonant microsensors
/in MEMS, PressureThe new PaRiS research project focuses on the development of technological complexes for the production of resonator structures for resonant sensors based on polycrystalline silicon for use as pressure sensors