A variety of examples illustrate our research spectrum in micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS).
For example, we are developing miniature pressure sensor elements (MEMS) that measure pressure and strain with high precision, stability and reliability.
Silicon-based MEMS sensors applied to special bolts can monitor safety-relevant bolt connections in mechanical engineering, materials handling and wind turbines.
In medical technology, we develop MOEMS sensors for continuous measurement of vital parameters such as heart rate and blood oxygen saturation. The latest result of this research is a miniaturized sensor that also monitors blood pressure in the ear.
Feasibility studies are carried out e.g. to check the applicability of a sensor principle to a customer-specific problem
- To check technological questions – does something work in the intended way?
- Agreement on defined process assembly and test steps
- As precursor of a development project and decision support for a downstream development has a risk-minimizing effect
The CiS Research Institute has been a partner for customer-specific developments of silicon-based sensors for 30 years. These are used in serial products of highest quality and are characterized by the following features:
- Intensive coordination with the customer on specifications, time and cost budgets
- Contents can be the development of processes, sensors and systems
- Development stages (in coordination with the customer): prototype ➜ zero series ➜ series