Microsensor technology based on nano- and microcondensation
| German title: | Mikrosensorik auf Basis von Nano- und Mikrokondensation | |
| Acronym: | MiNaKo | |
| Duration: | 1st April 2012 - 31st October 2014 | |
| Description: | From the point of view of being able to record and calibrate the energy- and quality-relevant microclimatic and calibrate the energy and quality-relevant microclimatic conditions, the aim of the project was to - thermodynamic and kinetic description of the condensation and evaporation process (nucleation and evaporation process (nucleation and nucleus growth) in the nanometer and micrometer range on solid surfaces, preferably silicon oxide, silicon nitride - in theoretical modeling and simulation of the signal formation to capture the condensation and evaporation and their visualization (non-electrical signal modulation) - in the investigation of the correlations of condensation and evaporation of water on solid surfaces and their modulation into an electrical signal (capacitance, conductivity, impedance) (transducer) even in the presence of impurities - in investigations on signal formation for the phase transition water/ice (visual/electrical) - in investigations of functionalized surfaces and their altered condensation and evaporation behavior of water vapor and their effects on the metrological behavior - Investigations of nucleation and nucleus growth during condensation and evaporation in the nanometer range (condensation nuclei of the surface in comparison to impurities) |
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| Markets: | Metrology | |
| Funded by: | BMWI |  |
| Funding code: | VF110019 | |
| Contact: | Contact us about this project via our business unit MEMS | |
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