Coriolis force based mems mass flow sensor for dosing in bio- and medical technology
|German title:||Corioliskraft basierter Mems Massenflusssensor für die Dosierung in der Bio- und Medizintechnik|
|Duration:||1st February 2013 - 31st July 2015|
|Description:||A silicon-based mass flow sensor was developed based on freely available design proposals from universities and research institutions.
Measuring range, various sizes 0.1 mgl/min to 100 mg/min
Pressure upper limit approx. 16 bar
Accuracy 0.5 to 1
Integrated temperature sensor, temperature diode for temperature measurement and compensation of piezo resistors. -40°C to +120°C
Microdosing or flow detection of liquids containing particles (water, oils, solutions, contrast agents, calibration standard for other measuring methods and micropumps).
The sensor is made of silicon and is manufactured with technologies of microsystem technology. The measuring principle is based on the Coriolis force, the oscillation of the capillary was evaluated by a piezoresistive measuring bridge. Alternatively, a capacitive principle was investigated. An electrostatic drive was integrated into the frame and capillary for excitation. The sensor is able to measure mass flow and density as well as the temperature of the liquid. The temperature measurement is necessary to compensate for the temperature dependence of the piezoresistive resistors.
|Markets:||Biotechnology, Medical Technology, Metrology, Automation|
|Contact:||Contact us about this project via our business unit MEMS|
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