Development of fine-granular, imaging-artefact-poor pixel radiation detectors for medical applications based on a micro-nano-structuring module for lithographic processes
|German title:||Entwicklung feingranularer, abbildungsartefaktarmer Pixel-Strahlungsdetektoren für medizinische Anwendungen auf Basis eines Mikro-Nano-Strukturierungsmoduls für lithographische Prozesse|
|Duration:||1st July 2012 - 30th April 2014|
|Description:||The RadioMed project aimed at the creation of fine granular, low imaging artifact pixel radiation detectors for medical applications. The basis of this development is the generation of a structuring module micro-nano (M-N), which allows high imaging homogeneity and accuracy down to the sub-micron range and consequently opens up prerequisites for new sensor applications with smaller pixel sizes. For the micro-nano-structuring of the various microsensor levels, mask-supported exposure processes were combined with laser and electron beam direct lithography for this purpose.
To this end, new interfaces and cooperation chains were investigated and validated in this project, which are rather atypical for a classical photolithographic process.
The technology allows to enforce rapid prototyping for sensory solutions via the integration of direct exposure processes and to create realization possibilities for highly specialized sensors even in small and smallest quantities on the basis of a 6-inch wafer operation.
|Markets:||Medical Technology, Metrology, Automation|
|Partners:||ML&C GmbH, Jena|
|Project sponsor:||EuroNorm GmbH|
|Contact:||Contact us about this project via our former business unit Silicon Detectors|
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