Semiconductor Complex Measurement Station
| German title: | Halbleiterkomplexmessplatz | |
| Acronym: | HKM | |
| Duration: | 21st December 2012 - 30th November 2014 | |
| Description: | The semiconductor complex measuring station (HKM) is designed to meet the increased demands of the latest technologies for ever more complex measurement and analysis methods. The growing pressure on time and costs to achieve ever shorter development times to prototype or end product requires not only targeted test plans and shortened throughput times, but also accurate analyses to enable decisions to be made in the shortest possible time on the further development path to be taken. Given the increasing complexity of the layer systems and test structures to be investigated, it is already no longer sufficient to use just one or two measurement methods. Instead, meaningful interpretable results are increasingly only obtained when the parameters from several measurement methods are compared or combined with one another. The research project BiZePS, the work of the research groups, photovoltaics and other application areas (MEMS, MOEMS, radiation detectors, etc.) or the research conception of CiS required knowledge of the used materials and semiconductor structures not only at room temperature but also at the sensor application temperatures (-60°C ... +300°C ) in order to develop high-performance sensors for harsh-environment environments with high reliability and lifetime. The addition of "measurement methods for the determination of mechanical stresses" to the measurement portfolio was therefore necessary in CiS, because the development of the last few years has shown that the statements of the electrical measurement methods in the development of MEMS (e.g. pressure sensors, cantilevers, etc.) were not sufficient to comprehensively characterize the technologies or the sensors. |
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| Markets: | Electronics, Optics, Metrology, Automation | |
| Funded by: | TMWAT | |
| Project sponsor: | TAB | |
| Funding code: | 2012 WIN 0119 | |
| Contact: | Contact us about this project via our business unit MEMS | |
| Contact us about this project via our business unit MOEMS | ||
| Contact us about this project via our former business unit Silicon Detectors | ||
News articles about HKM: | ||
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Semiconductor Complex Measuring Station 29. January 2016 |
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Semiconductor Complex Measuring Station 12. November 2015 |
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Semiconductor Complex Measurement Station 5. November 2014 |
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