Differential pressure sensors resistant to overload
|German title:||Überlastfeste Differenzdrucksensoren|
|Duration:||1st September 2014 - 31st December 2016|
|Description:||In the project, microsystems with piezoresistive sensor elements for measuring low differential pressures with extremely high overload resistance were developed.
The developed pressure sensors have a proven minimum burst strength of 200 bar, with a nominal pressure range of 0.01 bar. Depending on the load case, sensors up to a maximum pressure of 400 bar have also been tested with low failure rates.
|Project sponsor:||EuroNorm GmbH|
|Contact:||Contact us about this project via our business unit MEMS|
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