Differential pressure sensors resistant to overload
| German title: | Überlastfeste Differenzdrucksensoren | |
| Acronym: | ÜLaDru | |
| Duration: | 1st September 2014 - 31st December 2016 | |
| Description: | In the project, microsystems with piezoresistive sensor elements for measuring low differential pressures with extremely high overload resistance were developed. The developed pressure sensors have a proven minimum burst strength of 200 bar, with a nominal pressure range of 0.01 bar. Depending on the load case, sensors up to a maximum pressure of 400 bar have also been tested with low failure rates. |
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| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF140049 | |
| Contact: | Contact us about this project via our business unit MEMS | |
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