Multifotodiode with multiple three-dimensionally delimited active areas for high resolutions and temperatures
| German title: | Multifotodiode mit mehreren dreidimensional abgegrenzten aktiven Bereichen für hohe Auflösungen und Temperaturen | |
| Acronym: | MuFoDi | |
| Duration: | 1st March 2015 - 31st May 2017 | |
| Description: | The project aimed to develop a photodiode array with improved characteristics in terms of resolution and temperature performance for applications in high-resolution positioning systems and in high ambient temperatures. The use of inductive coupled plasma (ICP) etching reduced crosstalk and spacing between adjacent photodiodes. Further separation of the photodiodes from each other and from the substrate was achieved by using Von SOI material. Two prototypes were fabricated for the aforementioned main applications. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF140127 | |
| Contact: | Contact us about this project via our former business unit Silicon Detectors | |
News articles about MuFoDi: | ||
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Particle measurement by laser diffraction 3. May 2021 |
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