Production-oriented introduction of a bonding process using integrated reactive metal layers
| German title: | Produktionsgerechte Einführung eines Bondverfahrens mittels integrierter reaktiver Metallschichten | |
| Acronym: | iRMS | |
| Duration: | 1st March 2015 - 31st July 2017 | |
| Description: | The aim of the project was the production-oriented technology development of a bonding process using integrated reactive metal layers (RMS) for high-precision and heat-sensitive joining processes in microsystems technology. An RMS-supported bonding process was investigated on two concrete applications from the MOEMS and MEMS area with regard to their technological and economic aspects and ultimately integrated into a production chain. | |
| Markets: | Querschnitttechnologie für alle Branchen, Biotechnology, Medical Technology, Electronics, Optics, Mechanical Engineering, Metrology, Automation | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF140148 | |
| Contact: | Contact us about this project via our business unit MEMS | |
| Contact us about this project via our business unit MOEMS | ||
« back to project overview
