Glowing Body Silicon Emitter
| German title: | Glowing Body Silicon Emitter | |
| Acronym: | GloBSiE | |
| Duration: | 1st June 2016 - 30th November 2018 | |
| Description: | The aim was to develop a miniaturized infrared emitter based on a microstructured silicon membrane without a metallic conductive path structure on the emitting functional layer. By means of multiphysical simulations of the emitter layer, a suitable design variant with a corresponding layer system was verified and a manufacturing process was developed that is fully CMOS-compatible at wafer level. Test structures were used to demonstrate the functionality of the emitters. These can be further optimized. Such emitters are used, for example, in non-dispersive sensors for detecting and determining the concentration of gases. |
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| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF150183 | |
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