Integrated piezoresistive silicon force sensors
|German title:||Integrierte piezoresistive Siliziumkraftsensoren|
|Duration:||1st June 2016 - 30th November 2018|
|Description:||The objectives of the project were the design, fabrication and characterization of high precision amplifiers simultaneously fabricated with a force sensor and integrated next to the piezoresistive bridge. Theoretical and numerical analyses for determining the parameters of the INKA sensors were systematically performed. A key technique, decoupling the electrical and mechanical characteristics of the core sensors and peripheral amplifiers, was developed using a well technology and successfully applied to the prototype. Eleven different preamplifiers were designed and fabricated among six amplifier architectures. Systematic measurements and analysis including failure analysis were performed. The new solution does not affect the electrical and mechanical properties of the core sensor and achieves low-noise and noise-free signal processing. The complete characterization of the co-designed test transistors also provides design information for amplifier integration of other sensor types.
Direct preamplification on the sensor chip while maintaining the same chip area increases the added value of the sensors by improving the signal-to-noise ratio and increasing the dynamic range.
|Project sponsor:||EuroNorm GmbH|
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