Sensor for Heat Radiation
| German title: | Sensor for Heat Radiation | |
| Acronym: | SHeRa | |
| Duration: | 1st March 2017 - 31st August 2019 | |
| Description: | The aim of the project was to develop a silicon-based bolometer. Building on technological experience in the field of MEMS pressure sensor technology, silicon thermistors and temperature diodes were used as detecting elements. The elements were integrated into a free-standing membrane and interconnected to form a highly sensitive sensing bridge. All technologies used, including the enclosure, take place at wafer level. The operating temperature range was increased to 125 °C compared to the state of the art. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF160136 | |
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