Micro-Structure Transformation of Silicon
| German title: | Micro-Structure Transformation of Silicon | |
| Acronym: | MSTS | |
| Duration: | 1st June 2017 - 30th April 2019 | |
| Description: | For basic technologies for the migration of sub-µm Si structures (MSTS), individual processes were initially developed, followed by process modules. Thinnest membranes for pressure sensors, SOI regions for high-temperature pressure sensors and buried dopants can thus be produced. These are used for the production of improved or novel microsensor or MEMS applications. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | VF160033 | |
| Contact: | Contact us about this project via our business unit MEMS | |
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