Next generation pressure sensors with SiCer technology
| German title: | Drucksensoren der nächsten Generation mit SiCer-Technologie | |
| Acronym: | DS-SiCer | |
| Duration: | 1st September 2019 - 31st August 2022 | |
| Description: | The objective of the HIPS growth core is to establish a joint, novel technology platform of the alliance partners, which is based as an essential building block on the combination of silicon and ceramics, a technology that is built up as a three-dimensional multilayer structure and, in addition to electrical and electronic functions for sensor information acquisition and processing, also contains system technology elements of fluidics and sensor technology (SiCer®). Within the scope of the joint project VP3, an innovative multi-sensor platform for gases is to be developed, which can quantitatively measure gas concentrations, pressures and temperatures in demanding working environments. The CiS subproject pursues two general goals. One is the conception, simulation, processing and qualification of a pressure sensor based on SiCer. On the other hand, this includes the conception, simulation, processing and qualification of Si semiconductor processes, assembly and interconnection technology and measurement technology for further sensor types such as NDIR sensor temperature sensor and multisensor. | |
| Funded by: | BMBF |  |
| Project sponsor: | Projektträger Jülich | |
| Funding code: | 03WKDG03A | |
| Contact: | Contact us about this project via our business unit MEMS | |
News articles about DS-SiCer: | ||
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First Status Workshop of the BMBF Growth Core HIPS 25. March 2021 |
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SiCer technology for high performance sensor systems 24. November 2020 |
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1st status workshop of the BMBF growth core HIPS – High Performance Sensor Technology 12. March 2020 |
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