Polycrystalline silicon as a functional layer in microsystems technology
| German title: | Polykristallines Silizium als funktionale Schicht in der Mikrosystemtechnik | |
| Acronym: | PoSiMi | |
| Duration: | 1st May 2020 - 31st October 2022 | |
| Description: | In the project "Polycrystalline silicon as a functional layer in microsystem technology", the effect of the production of polycrystalline layers on the material parameters is being investigated. Since the production of polycrystalline layers depends on the equipment used and one can thus change the properties of the layers, these investigations are important in order to find out how such layers can be used in microsystem technology in the future. | |
| Funded by: | BMWI |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF200014 | |
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