Sensor development for negative pressure, elevated temperatures and media contact
| German title: | Sensorentwicklung für Unterdruck, erhöhte Temperaturen und Medienkontakt | |
| Acronym: | Pedro | |
| Duration: | 1st December 2019 - 30th November 2021 | |
| Description: | The aim of the cooperation project is to develop a modular sensor measurement system for monitoring pressure in vacuum processes (e.g. PVD, CVD): During a media-carrying vacuum process, the pressure measurement system is subject to special requirements if the pressure parameter is to be measured as a manipulated variable in the vacuum process chamber close to the actual process. The project therefore aims to design and coordinate the components of the pressure measurement system in such a way that media contact is reduced as far as possible, temperatures of up to 300°C are not harmful to the components and the sensor has a small surface area and is heated. The pressure measuring system should have a wide pressure measuring range of 0.1 to 1013 mBar, a high accuracy of 1 %FS and a low temperature susceptibility TKR = 0.05 %/K @ 1 bar with a simultaneous high burst pressure of >20 bar. | |
| Funded by: | BMWI |  |
| Project sponsor: | AIF | |
| Funding code: | ZF4001705WM9 | |
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