Development of a hardness measuring head based on a novel combined force-displacement sensor with a resolution of 100pm to determine the hardness of surfaces in the nanometer range
| German title: | Entwicklung eines Härtemesskopfes auf Basis eines neuartigen kombinierten Kraft-Wegsensors mit einer Auflösung von 100pm zur Ermittlung der Härte von Oberflächen im Nanometerbereich | |
| Acronym: | NanoSense | |
| Duration: | 1st February 2021 - 31st July 2023 | |
| Description: | Current devices for measuring surface hardness feature a displacement sensor integrated separately into the machine to determine the distance traveled when penetrating the body to be tested. As a result, the hardness testing machines have a very rigid design, are extremely expensive and can only measure small components. The project therefore aims to develop a new measuring head for flexible integration into universal testing machines and xy manipulators. For the first time, force and displacement measurement are integrated into the testing machine as novel, combined elements, eliminating the need for a rigid machine frame. The new sensor unit allows for the first time the resolution of the force to an accuracy of 100pm, as well as the precise, quasi non-destructive testing of any material (even extremely thin layers). For the first time, it will be possible to measure large-area components. The project will also develop a two-stage drive concept with piezo stack actuators as well as the electronics for evaluating and processing the sensor signals. Calibration will be supplemented by an innovative auto-calibration method based on silicon leaf springs. | |
| Funded by: | BMWI |  |
| Project sponsor: | AIF | |
| Funding code: | KK5085702SN0 | |
News articles about NanoSense: | ||
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NanoSense – Development of a hardness measuring head based on a novel combined force-displacement sensor 10. January 2024 |
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NanoSense – Development of a hardness measuring head based on a novel combined force-displacement sensor 24. February 2021 |
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