Gas detection based on absorbers integrated in thermopiles
|German title:||Gasdetektion auf Basis von in Thermopiles integriertem Absorber|
|Duration:||1st August 2021 - 31st January 2024|
|Description:||The aim of the project is to develop thermopiles with absorbers based on layer systems and photonic crystals. The layer systems and photonic structures are to be manufactured in such a way that thermopiles which are particularly sensitive to different wavelengths in the spectral range between 2 and 20 µm are produced simultaneously with one process. The selective absorbers should exhibit selective absorption to the wavelengths of nitrogen oxide, ethanol, water, acetone and carbon dioxide.
These absorbers shall preferably be made of photonic crystals. The photonic crystals produced in this process are achieved by structuring as few planes as possible. Hole structures in an additional silicon layer or in the thermocouples are suitable for this purpose.
|Contact:||Contact us about this project via our business unit MOEMS|
News articles about PhIR-10:
|CiS Research Institute at the microTEC Südwest Cluster Conference 2022
16. May 2022
|R&D project PhIR-10 – Gas detection based on absorbers integrated in thermopiles
6. August 2021
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