Piezoresistive technology platform with minimal zero offset In application: technology platform minimal zero offset
| German title: | Piezoresistive Technologie-Plattform mit minimalem Null-Offset Im Antrag: Technologie-Plattform minimalem Null-Offset | |
| Acronym: | miniOffset | |
| Duration: | 1st October 2022 - 31st March 2025 | |
| Description: | The aim of the project is to develop a technology platform for high-precision sensors based on piezoresistive transduction. A robust layout against technological variations (doping parameters, layer voltages, chip size, membrane geometry, resistor bridge configuration) serves as a basis. The platform, consisting of a piezoresistive sensing bridge with integrated microstructures, uses low-cost CMOS/MEMS-compatible materials and aims at on-chip minimization of cross-sensitivities, eliminating the need for costly compensations after sensor assembly. | |
| Funded by: | Federal Ministry of Economic Affairs and Climate Action |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF220087 | |
News articles about miniOffset: | ||
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Silicon based piezoresistive sensors with a minimal bridge base detuning 19. October 2022 |
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