Sensor for determining the layer stress
| German title: | Sensor zur Bestimmung der Schichtspannung | |
| Acronym: | Nanolever | |
| Duration: | 1st February 2023 - 31st July 2025 | |
| Description: | A number of measurement methods use layer tension as a physical principle. A number of innovative applications exist for concentration measurement, such as with immobilized antibodies or sensitive layers for hydrogen detection. A sensor for the determination of the film force is being developed. The evaluation is piezoresistive. The basic layout is a mechanical bridge. High sensitivity to the measurand with high robustness to the disturbance variables is achieved. | |
| Funded by: | BMWK |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49VF220011 | |
| Contact: | Contact us about this project via our business unit MEMS | |
News articles about Nanolever: | ||
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Highly sensitive sensor for measurement of layer stress in biological layers and sensitive layers for hydrogen detection 17. May 2023 |
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