Stress management in thin membranes
| German title: | Spannungsmanagement in dünnen Membranen | |
| Acronym: | SMP | |
| Duration: | 1st November 2023 - 30th April 2026 | |
| Description: | IR micro emitters and IR micro sensors are used in environmental and household technology. The CMOS-compatible high-efficiency IR emitters and IR sensors are manufactured using MEMS technology. A technology package is being developed to control the residual stresses in the membranes that occur in the MEMS process in such a way that both the wafer bending in the entire manufacturing process and the chip membrane warping in the application are minimized or optimized. | |
| Funded by: | BMWK |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF230027 | |
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