Stress management in thin membranes
|Spannungsmanagement in dünnen Membranen
|1st November 2023 - 30th April 2026
|IR micro emitters and IR micro sensors are used in environmental and household technology. The CMOS-compatible high-efficiency IR emitters and IR sensors are manufactured using MEMS technology. A technology package is being developed to control the residual stresses in the membranes that occur in the MEMS process in such a way that both the wafer bending in the entire manufacturing process and the chip membrane warping in the application are minimized or optimized.
|Federal Ministry of Economic Affairs and Climate Action
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