High-temperature-optimized contact metallizations
| German title: | Hochtemperaturoptimierte Kontaktmetallisierungen | |
| Acronym: | LaWaDos | |
| Duration: | 1st March 2024 - 28th February 2026 | |
| Description: | The contacting of piezoresistive sensors via wire bond contacts should allow process temperatures above 500 degrees Celsius. Instead of the established metallization, a HAT-stable contact system is being developed that uses a refractory metal, preferably with tungsten or tantalum as a barrier layer. The reproducible production of these contacts poses a challenge for complex-shaped sensor elements. These processes are therefore optimized and subsequently standardized for production. | |
| Funded by: | Federal Ministry of Economic Affairs and Climate Action |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF230021 | |
| Contact: | Contact us about this project via our business unit MEMS | |
News articles about LaWaDos: | ||
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Project start LaWaDos: High-temperature-optimized contact metallizations 30. April 2024 |
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