DMS in ceramics
| German title: | DMS in Keramik | |
| Acronym: | DMS in Keramik | |
| Duration: | 1st January 2024 - 30th June 2026 | |
| Description: | A differential pressure sensor with a media-resistant ceramic bending plate for wet-wet applications is being developed. The protection of the Si-DMS in contact with various aggressive media and mechanical manipulation while maintaining the sensitivity of the sensor is an unsolved problem. The contact pads and wire bonds are particularly critical. In the proposed solution, the Si strain gage is integrated into a low-temperature co-fired ceramic and sintered. | |
| Funded by: | Federal Ministry of Economic Affairs and Climate Action |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF230066 | |
| Contact: | Contact us about this project via our business unit MEMS | |
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