Minimization of hysteresis in silicon-based pressure sensors
| German title: | Minimierung Hysterese siliziumbasierter Drucksensoren | |
| Acronym: | NO-HYST | |
| Duration: | 1st April 2025 - 30th September 2027 | |
| Description: | Pressure and temperature hysteresis significantly affect measurement accuracy. Pressure hysteresis occurs in particular at very high pressure ranges, 400 bar to 2000 bar, and in cases of extreme miniaturization. This project investigates the cause, which has not yet been fully clarified, and implements steps for compensation using various approaches. In addition, the necessary hydraulic testing technology for the high-pressure range is being developed. | |
| Funded by: | BMWK |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF202451 | |
| Contact: | Contact us about this project via our business unit MEMS | |
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