Highly damped piezoresistive tilt sensor
| German title: | Stark gedämpfter piezoresistiver Neigungssensor | |
| Acronym: | NEIS | |
| Duration: | 1st February 2025 - 30th June 2027 | |
| Description: | An inexpensive silicon-based sensor for leveling is being developed. The application concerns leveled machines and measuring devices. The target parameters are: inclination in 2 axes, calibration-free zero point, a measuring range of ± 5°, accuracy in the target range ± 20° angular seconds, linear behavior over the entire measuring range, insensitive to temperature fluctuations, a damped spring-mass system. | |
| Funded by: | BMWK |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF240035 | |
| Contact: | Contact us about this project via our business unit MEMS | |
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