Polysilicon-based resonant microsensors
| German title: | Polysilizium basierte Resonante Mikrosensoren | |
| Acronym: | PaRiS | |
| Duration: | 1st July 2025 - 31st December 2027 | |
| Description: | The aim is to develop polycrystalline silicon resonator structures for pressure sensors with hermetic high-vacuum encapsulation, electrical contacting, and insulation. The resonance frequency is based on the mechanical preload generated by pressure. The tensile preload ensures stable vibration modes. The goals are high frequency stability, low sensitivity to static pressure, and transferability to other MEMS such as acceleration sensors with benchmark performance and high stability. | |
| Funded by: | Federal Ministry for Economic Affairs & Energy |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF240150 | |
News articles about PaRiS: | ||
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Project launch PaRiS – Polysilicon-based resonant microsensors 7. October 2025 |
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