Modular microprobe systems
| German title: | Modulare Mikrotaster-Systeme | |
| Acronym: | MMS | |
| Duration: | 1st February 2015 - 31st May 2017 | |
| Description: | The overall objective was to build a modular micro-scanner system based on piezoresistive cantilevers, which can be used to cover a wide range of measurement tasks in the field of shape deviations. For this purpose, important system components and technologies were further or newly developed. A new type of microprobe system was developed as a demonstrator, in which silicon-based piezoresistive cantilever chips with lowered bond islands and tips on the front side of the wafer are used, so that flush measurements are possible. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF140122 | |
| Contact: | Contact us about this project via our business unit MEMS | |
News articles about MMS: | ||
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Customized piezoresistive micro scanners 14. May 2015 |
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