Multilayer structures for chemically resistant, long-term stable sensor technology
| German title: | Multilayer Aufbauten für chemisch resistente, langzeitstabile Sensorik | |
| Acronym: | MARLen | |
| Duration: | 1st August 2017 - 31st January 2020 | |
| Description: | The objective was the new and further development of wafer-level packaging technologies as a technological platform for the realization of cost-effective sensor technology for harsh media applications. On this basis, a wafer-level encapsulated differential pressure sensor was developed for use in aggressive, corrosive and electrically conductive gaseous or liquid media. A demonstrator proves the functionality. The solution approach pursued for the media-resistant differential pressure sensor was registered as a patent under the title "Semiconductor-based differential pressure sensor and method for its manufacture" (file number 10 2019 135 606.7). | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | 49MF170010 | |
| Contact: | Contact us about this project via our business unit MEMS | |
News articles about MARLen: | ||
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Patent application for multilayer structures for chemically resistant, long-term stable differential pressure sensors 13. November 2020 |
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