Integrated reflectors for MEMS IR emitters
| German title: | Integrierte Reflektoren für MEMS IR-Strahler | |
| Acronym: | IReMIS | |
| Duration: | 1st January 2019 - 30th June 2021 | |
| Description: | In the project, demonstrators of improved MEMS IR emitters will be developed, which will be enhanced by wafer mounting solutions with both a backside reflector and a reflector with a cover cap. The aim is to increase the light yield in the long wavelength range between 7 and 10µm for applications in gas sensing while reducing system requirements. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | 49MF180117 | |
| Contact: | Contact us about this project via our business unit MOEMS | |
News articles about IReMIS: | ||
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Mid-Week Coffee Break – A Virtual Technology Conversation 12. May 2021 |
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