Integrated reflectors for MEMS IR emitters
| German title: | Integrierte Reflektoren für MEMS IR-Strahler | |
| Acronym: | IReMIS | |
| Duration: | 1st January 2019 - 30th June 2021 | |
| Description: | Through a novel wafer mounting solution, MEMS IR emitters have been developed with a reflector and a cover cap integrated into the miniaturized chip package. As a result, the chips are hermetically sealed and exhibit improved radiance in the spectral range above 7 µm. Initial accelerated lifetime tests at the currently specified rated power indicate an operating lifetime of more than 1 million hours. |
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| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | 49MF180117 | |
| Contact: | Contact us about this project via our business unit MOEMS | |
News articles about IReMIS: | ||
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Mid-Week Coffee Break – A Virtual Technology Conversation 12. May 2021 |
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