Long-term stable micro-macro coupling to build ultra-flat silicon strain sensors for macroscopic test specimens
| German title: | Langzeitstabile Mikro-Makro-Kopplung zum Aufbau ultraflacher Siliziumdehnungssensoren für makroskopische Prüfkörper | |
| Acronym: | Mikado | |
| Duration: | 1st April 2019 - 30th September 2021 | |
| Description: | A method for the assembly of novel force sensors with integrated silicon strain gages is required which meets the following requirements: Wire bonding of the Si strain gages before they are mounted on the test specimen. No wire bonding on the test specimen Long-term stable joining of the Si strain gages, preferably glass frit Low temperature load of the test specimen, partial heating is tolerable Universally applicable on test specimens of different geometry Preferably, a prefabricated sensor element, with Si strain gauge, printed circuit board, signal processing should be joined to the test specimen. As a typical value should be aimed for: Long-term stability in the nominal temperature range (-40°C to +80°C, max. 80%rh): 1 %measuring span/yr. By using the Si strain gages for force sensors and different test specimens under the boundary conditions set above, advantages and improvements are to be expected: Smaller and stiffer spring body to set up as a force sensor. Higher measuring span Easier realization of multi-component force sensors due to the integrated full bridge | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | 49MF180163 | |
News articles about Mikado: | ||
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Mikado – Long-term stable micro-macro coupling to build ultra-flat silicon strain sensors for macroscopic test specimens 9. July 2021 |
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Presentation at ACHEMA Pulse on 15.06.2021 9. June 2021 |
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Better safe than sorry – flange seal monitoring 22. June 2020 |
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Microsensors for measuring the biasing force 21. October 2019 |
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Micro strain sensors for monitoring the mechanical load of machines and machine elements 28. March 2019 |
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