Pressure sensor made of <110> silicon increased linearity
| German title: | Drucksensor aus <110> Silizium erhöhter Linearität | |
| Acronym: | DS<110> | |
| Duration: | 1st July 2019 - 31st December 2021 | |
| Description: | The effort required for calibrating a pressure measuring cell is greatly reduced by linear relationships between the dependent variables. The linearity can be increased if the measuring bridge is constructed from identically acting piezoresistive measuring resistors. Measuring resistors made of <110> p-silicon exhibit a very low lateral effect and are ideally suited for this measure. A pressure sensor is therefore constructed from this material. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | 49MF190023 | |
| Contact: | Contact us about this project via our business unit MEMS | |
News articles about DS<110>: | ||
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Reduction of calibration effort for high-precision pressure sensors 21. July 2022 |
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Trade Fair Sensor+Test and Congress SMSI 30. April 2021 |
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New research project launched: Pressure sensor made of silicon with increased linearity (DS) 1. August 2019 |
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