Textured Blackbody MEMS IR Illuminator
| German title: | Texturierter Schwarzkörper MEMS IR-Strahler | |
| Acronym: | TeSIS | |
| Duration: | 1st August 2019 - 31st January 2022 | |
| Description: | In TeSIS, demonstrators of improved MEMS IR emitters are developed whose active heating zones have a texturing. This texture leads to high emissivities and spatially homogeneous radiation, which are important criteria for demanding applications. Compared to the state of the art, the TeSIS approach is based on a significantly simplified process chain. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | 49MF190034 | |
| Contact: | Contact us about this project via our business unit MOEMS | |
News articles about TeSIS: | ||
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Optical CO2 measurement with an IR sensor at the Innovation Day for SMEs in Berlin 15. June 2023 |
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Emitters with blackbody properties due to integrated texture 17. August 2022 |
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CiS Forschungsinstitut presents itself successfully at InnoCON Thuringia 2019 14. November 2019 |
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