Improving the stability of hybrid silicon strain sensors
| German title: | Verbesserung der Stabilität hybrid aufgebauter Silizium-Dehnungssensoren | |
| Acronym: | SiDMESES | |
| Duration: | 1st October 2020 - 28th February 2023 | |
| Description: | The aim is to significantly improve the long-term stability of hybrid sensors with Si strain gauges by various measures: targeted and accelerated reduction of mechanical assembly stresses, precise extremely parallel and symmetrical assembly, reduction of the ductility of the joining materials and variation of the position of the Si strain gauge with the aim of high sensitivity to the measurand pressure and insensitivity to changes due to the assembly stress. | |
| Funded by: | BMWI |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF200061 | |
| Contact: | Contact us about this project via our business unit MEMS | |
News articles about SiDMESES: | ||
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CiS Forschungsinstitut for the first time at SEMICON in Munich 5. November 2024 |
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Highlight of the CiS Forschungsinstitut at the Hannover Messe 2024: Galvanically isolated incremental sensor 18. April 2024 |
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Improvement of the stability of hybrid silicon strain sensors (SiDMeses) 31. August 2023 |
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