Photoacoustic gas sensor with reference gas sensor
| German title: | Photoakustischer Gassensor mit Referenzgassensor | |
| Acronym: | PAS | |
| Duration: | 1st February 2021 - 31st July 2023 | |
| Description: | The aim is to develop a photoacoustic gas sensor that can be manufactured in an integrated manner, as an open or closed system. The focus is on the development of the microphone component for a photoacoustic gas sensor with the following boundary conditions: High sensitivity, suitable for wafer-level packaging", capability for silicon direct bonding, piezoresistive operating principle, operating range -40°C to 140°C. | |
| Funded by: | BMWI |  |
| Project sponsor: | Euronorm | |
| Funding code: | MF200114 | |
| Contact: | Contact us about this project via our business unit MEMS | |
News articles about PAS: | ||
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Photoacoustic gas sensors with reference gas sensor 13. March 2024 |
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Photoacoustic sensors based on wafer-level packaging 22. April 2021 |
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