Resonant silicon differential pressure sensors
| German title: | Resonante Silizium-Differenzdrucksensoren | |
| Acronym: | ReSi-DDS | |
| Duration: | 1st November 2021 - 30th April 2024 | |
| Description: | The aim of the proposed project is to develop stacking technologies for the manufacture of resonator structures for resonant silicon pressure sensors. One of the main requirements for the resonator structures to be developed and their embedding is to ensure a mechanical pressure load on both sides and thus enable the production of a differential pressure sensor. As a demonstrator, a functional resonant differential pressure sensor with high short- and long-term stability is to be manufactured. | |
| Funded by: | BMWI |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF210095 | |
News articles about ReSi-DDS: | ||
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Development of Stacking Technologies for Resonant Silicon Differential Pressure Sensors (ReSi-DDS) 17. November 2021 |
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