Long-term stable passivation of piezoresistive sensors for demanding sensor environments
| German title: | Langzeitstabile Passivierungen von piezoresitiven Sensoren für anspruchsvolle Sensorumgebungen | |
| Acronym: | PassDru | |
| Duration: | 1st January 2018 - 30th June 2020 | |
| Description: | Sensors for mechanical quantities require mechanical contact with the measurand. However, direct media contact poses a problem for silicon-based microsensors. To take full advantage of miniaturization, corrosion protection is applied at the chip level to enable application in more demanding environments without additional protective structures. Focusing on long-term stable protective coatings against body fluids and extreme ph-value spreads, various passivation coatings were evaluated, differing in their chemical composition. Doping adjustments increased the resistance of silicon as the basis of piezoresistive pressure sensors. Demonstrators were used to test the protective effect of the passivation measures. |
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| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | 49MF170089 | |
| Contact: | Contact us about this project via our business unit MEMS | |
News articles about PassDru: | ||
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Congress contribution on passivation options for MEMS sensors at the ACHEMA in Frankfurt 22. August 2022 |
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Exhibition booth at HM21 Digital Edition 12. April 2021 |
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Long-term stable passivation of piezoresistive sensors for demanding sensor environments 11. January 2021 |
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