Long-term stable passivation of piezoresistive sensors for demanding sensor environments
|German title:||Langzeitstabile Passivierungen von piezoresitiven Sensoren für anspruchsvolle Sensorumgebungen|
|Duration:||1st January 2018 - 30th June 2020|
|Description:||Sensors for mechanical quantities require mechanical contact with the measurand. However, direct media contact poses a problem for silicon-based microsensors. To take full advantage of miniaturization, corrosion protection is applied at the chip level to enable application in more demanding environments without additional protective structures.
Focusing on long-term stable protective coatings against body fluids and extreme ph-value spreads, various passivation coatings were evaluated, differing in their chemical composition. Doping adjustments increased the resistance of silicon as the basis of piezoresistive pressure sensors. Demonstrators were used to test the protective effect of the passivation measures.
|Project sponsor:||EuroNorm GmbH|
|Contact:||Contact us about this project via our business unit MEMS|
News articles about PassDru:
|Long-term stable passivation of piezoresistive sensors for demanding sensor environments
11. January 2021
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